Structural, electrical and optical properties of indium tin oxide films prepared by low-energy oxygen-ion-beam assisted deposition

Carter, 1997, Appl. Phys. Lett., 70, 2067, 10.1063/1.118953 Kim, 2000, Thin Solid Films, 377–378, 81, 10.1016/S0040-6090(00)01388-2 Dislich, 1988, J. Non-Cryst. Solids, 57, 371, 10.1016/0022-3093(83)90425-8 Zheng, 1993, Appl. Phys. Lett., 63, 1, 10.1063/1.109736 Bae, 2001, Nucl. Instr. and Meth. B, 178, 311, 10.1016/S0168-583X(01)00510-9 Chopra, 1983, Thin Solid Films, 102, 1, 10.1016/0040-6090(83)90256-0 Bender, 1998, Thin Solid Films, 326, 72, 10.1016/S0040-6090(98)00521-5 Zhang, 2000, Thin Solid Films, 376, 255, 10.1016/S0040-6090(00)01418-8 Liu, 2002, Europhys. Lett., 59, 606, 10.1209/epl/i2002-00147-6 Meng, 1998, Thin Solid Films, 322, 56, 10.1016/S0040-6090(97)00939-5 Kim, 2000, J. Appl. Phys., 88, 6021, 10.1063/1.1318368 Carvalho, 2000, Surf. Coat. Technol., 124, 70, 10.1016/S0257-8972(99)00619-2 Kim, 2000, Thin Solid Films, 377–378, 103, 10.1016/S0040-6090(00)01392-4