Structural, compositional and optical properties of PECVD silicon nitride layers

Journal Physics D: Applied Physics - Tập 45 Số 44 - Trang 445301 - 2012
F. Karouta1, Kaushal Vora1, Jie Tian1, C. Jagadish1,2
1#N#Australian National Fabrication Facility, ACT Node, Research School of Physics and Engineering, Australian National University, Canberra, ACT 0200, Australia
2Electronic Materials Engineering Department, Research School of Physics and Engineering, Australian National University, Canberra, ACT 0200, Australia

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Journal Physics D: Applied Physics

Tập 45 Số 44

445301

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