Stability tests of standard leaks for the calibration by a comparison method
Tài liệu tham khảo
Arai, 2010, Development of a constant pressure type flowmeter for the vacuum standard, J. Vac. Soc. Jpn., 53, 614, 10.3131/jvsj2.53.614
Ehrlich, 1992, Recommended practices for calibration and use of leaks, J. Vac. Sci. Technol. A, 10, 1, 10.1116/1.578137
EN 13192. Non Destructive testing – Leak Testing – Calibration of Reference Leaks for Gases, 2002.
Jitschin, 1988, Diffusion leak artifacts as a secondary standard for gas flow, Vacuum, 38, 883, 10.1016/0042-207X(88)90485-X
Hyland, 1986, Transfer leak studies and comparisons of primary leak standards at the National Bureau of Standards and Sandina National Laboratories, J. Vac. Sci. Technol. A, 4, 334, 10.1116/1.573922
Abbott, 1996, Commercial helium permeation leak standards: their properties and reliability, J. Vac. Sci. Technol. A, 14, 1242, 10.1116/1.579935
Hidalgo, 2008, Leak calibration by comparison with reference standard leaks, Vacuum, 82, 1151, 10.1016/j.vacuum.2008.01.050
Calcatelli, 2007, calibrations and reference flows: Practical example, Vacuum, 81, 1538, 10.1016/j.vacuum.2007.04.019
