Some effects of oxygen impurities on AlN and GaN

Journal of Crystal Growth - Tập 246 Số 3-4 - Trang 287-298 - 2002
S. K. Gayen1, L. J. Schowalter1, Donald T. Morelli2, Jaime A. Freitas3
1Rensselaer Polytechnic Institute, Troy, NY 12180 USA
2Delphi Research Laboratories, Shelby Township, MI 48315, USA
3Naval Research Laboratory - Washington, DC 20375, USA

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Youngman, 1990, J. Am. Ceram. Soc., 73, 3238, 10.1111/j.1151-2916.1990.tb06444.x

Slack, 1973, J. Phys. Chem. Solids, 34, 321, 10.1016/0022-3697(73)90092-9

Slack, 1987, J. Phys. Chem. Solids, 48, 641, 10.1016/0022-3697(87)90153-3

Pankove, 1992, 143

Mattila, 1996, Phys. Rev. B, 54, 16676, 10.1103/PhysRevB.54.16676

Seifert, 1983, Crystal Res. Technol., 18, 383, 10.1002/crat.2170180314

Seifert, 1986, Crystal Res. Technol., 21, 951, 10.1002/crat.2170210104

Chung, 1992, J. Appl. Phys., 72, 651, 10.1063/1.351848

R.Y. Korotkov, B.W. Wessels, Mater. Res. Soc. Symp. 595 (2000) W3.80.1.

Moore, 2001, Appl. Phys. Lett., 79, 2570, 10.1063/1.1411985

Pasternak, 1968, Phys. Status Solidi, 26, 591, 10.1002/pssb.19680260223

Yim, 1973, J. Appl. Phys., 44, 292, 10.1063/1.1661876

Slack, 1976, J. Crystal Growth, 34, 263, 10.1016/0022-0248(76)90139-1

Slack, 1977, J. Crystal Growth, 42, 560, 10.1016/0022-0248(77)90246-9

Strite, 1992, J. Vac. Sci. Technol. B, 10, 1237, 10.1116/1.585897

Fernandez, 2001, J. Crystal Growth, 231, 420, 10.1016/S0022-0248(01)01473-7

Kawabe, 1967, Electron. Eng. Jpn., 87, 62

Cox, 1967, J. Phys. Chem. Solids, 28, 543, 10.1016/0022-3697(67)90084-4

Maruska, 1969, Appl. Phys. Lett., 15, 327, 10.1063/1.1652845

Pankove, 1970, Appl. Phys. Lett., 17, 197, 10.1063/1.1653363

Dollinger, 1998, Mater. Res. Soc. Symp., 482, 745, 10.1557/PROC-482-745

Jacobsen, 2001, J. Crystal Growth, 230, 459, 10.1016/S0022-0248(01)01246-5

R.Y. Korotkov, J.M. Gregie, B.W. Wessels, Mater. Res. Soc. Symp. Proc. 639 (2001) G3.7.1.

Camphausen, 1971, J. Appl. Phys., 42, 4438, 10.1063/1.1659792

Monemar, 1998, Semicond. Semimetals, 50, 305, 10.1016/S0080-8784(08)63092-6

Monemar, 1998

Kosiki, 1970, Phys. Rev. Lett., 24, 1421, 10.1103/PhysRevLett.24.1421

Cunningham, 1972, J. Lumin., 5, 21, 10.1016/0022-2313(72)90032-4

Pankove, 1975, RCA Rev., 36, 163

Grzegory, 1998, Mater. Res. Soc. Symp. Proc., 482, 15, 10.1557/PROC-482-15

Freitas, 2001, J. Crystal Growth, 231, 322, 10.1016/S0022-0248(01)01456-7

Chung, 2001, J. Appl. Phys., 89, 5454, 10.1063/1.1342024

Ogino, 1980, Jap. J. Appl. Phys., 19, 2395, 10.1143/JJAP.19.2395

Xu, 2001, J. Crystal Growth, 222, 96, 10.1016/S0022-0248(00)00927-1

Neugebauer, 1996, Appl. Phys. Lett., 69, 503, 10.1063/1.117767

Osamura, 1972, Solid State Commun., 11, 617, 10.1016/0038-1098(72)90474-7

Tansley, 1988, Thin Solid Films, 164, 441, 10.1016/0040-6090(88)90174-5

Edgar, 2000, Mater. Sci. Forum, 338–342, 1599, 10.4028/www.scientific.net/MSF.338-342.1599

Tang, 1997, Mater. Res. Soc. Symp. Proc., 449, 119, 10.1557/PROC-449-119

Gassmann, 1996, J. Appl. Phys., 80, 2195, 10.1063/1.363112

Glaser, 1995, Phys. Rev. B, 51, 13326, 10.1103/PhysRevB.51.13326

Weeks, 1995, Appl. Phys. Lett., 67, 401, 10.1063/1.114642

J. Oila, V. Ranki, J. Kivioja, K. Saarinen, P. Hautojarvi, J. Likonen, J.M. Baranowski, K. Pakula, T. Suski, M. Leszczynski, I. Grzegory, Phys. Rev. B 63 (2001) 45205-1.

Saarinen, 1997, Phys. Rev. Lett., 79, 3030, 10.1103/PhysRevLett.79.3030

Perlin, 1997, Mater. Res. Soc. Symp. Proc., 449, 519, 10.1557/PROC-449-519

Lorenz, 1962, J. Electrochem. Soc., 109, 24, 10.1149/1.2425318

Rieger, 1997, Mater. Res. Soc. Symp. Proc., 449, 671, 10.1557/PROC-449-671

Borom, 1972, Bull. Am. Ceram. Soc., 51, 852

Harris, 1990, J. Mater. Res., 5, 1763, 10.1557/JMR.1990.1763

Slack, 1962, Phys. Rev., 126, 427, 10.1103/PhysRev.126.427

Sample provided by S.S. Park and K.Y. Lee, Samsung Advanced Institute of Technology, Suwon, South Korea.

Yun, 2000, Solid State Electron., 44, 2225, 10.1016/S0038-1101(00)00202-1

Sichel, 1977, J. Phys. Chem. Solids, 38, 330, 10.1016/0022-3697(77)90112-3

Luo, 2001, J. Electronic Mater., 30, 138, 10.1007/s11664-001-0007-1

Asnin, 1999, Appl. Phys. Lett., 75, 1240, 10.1063/1.124654

D.I. Florescu, V.A. Asnin, L.G. Mourokh, F.H. Pollack, R.J. Molnar, Mater. Res. Soc. Symp. 595 (2000) W39.89.1.

Polian, 1996, J. Appl. Phys., 79, 3343, 10.1063/1.361236

Wolcott, 1959, J. Chem. Phys., 31, 536, 10.1063/1.1730391

Iwanaga, 2000, J. Mater. Sci., 35, 2451, 10.1023/A:1004709500331

Slack, 1979, Solid State Phys., 34, 1, 10.1016/S0081-1947(08)60359-8