Slow light in silicon microring resonators

This paper experimentally investigated slow light effect in cascaded silicon-on-insulator (SOI) microring resonators. Double channel and single channel side-coupled integrated spaced sequence of resonators (SCISSOR) devices were fabricated with electron beam lithography and dry etching technology. The delay performances of the SCISSOR devices were demonstrated using non-return-to-zero (NRZ) and return-to-zero (RZ) signals at different bit rates. Group delays and bandwidths of cascaded microrings are significantly enhanced compared with single microring.