Simulation and fabrication of a 2D-flow sensor for simultaneous fluid characterization

Ernst, 2001, Dynamic Thermal Sensor-Principles in MEMS for Fluid Characterization, IEEE Sensors Journa, 1, 361, 10.1109/7361.983477

Kuntner, 2006, Simultaneous Thermal Conductivity and Diffusivity Sensing in Liquids Using a Micromachined Device, Sensors and Actuators A, 130-131, 62, 10.1016/j.sna.2005.11.021

Kohl, 2000, Wide Range Semiconductor Flow Sensors, Sensors and Actuators, 85, 139, 10.1016/S0924-4247(00)00370-8

van Oudheusden, 1990, High-sensitivity 2-D Flow Sensor with an Etched Thermal Isolation Structure, Sensors and Actuators, 22, 425, 10.1016/0924-4247(89)80007-X

Urban, 1985

Urban, 1990, High-resolution Thin-film Temperature Sensor Arrays for Medical Applications, Sensors and Actuators, 22, 650, 10.1016/0924-4247(89)80051-2

Cubukcu, 2008, Sensitivity-Maximizing and Error-Reducing Design of a Flow and Thermal Property Sensor, EuroSimE ‘08

Çubukçu, 2009, Frequency Response of a 2D Flow and Thermal Property Sensor, EuroSimE ‘09