Silicon nitride PhC nanocavities as versatile platform for visible spectral range devices

F. Pisanello1,2, L. Martiradonna3, A. Qualtieri3, T. Stomeo3, M. Grande4, P.P. Pompa3, R. Cingolani1,3, A. Bramati2, M. De Vittorio1,3
1National Nanotechnology Laboratory, CNR-Istituto di Nanoscienze, Scuola superiore ISUFI, Università del Salento, 16 Via Arnesano, Lecce 73100, Italy
2Laboratoire Kastler Brossel, CNRS UMR8552, Universitè Pierre et Marie Curie, Ecole Normale Supérieure, 4 Place Jussieu, 75252 Paris Cedex 05, France
3Center for Bio-Molecular Nanotechnology, Istituto Italiano di Tecnologia (IIT), Via Barsanti 1, Arnesano, Lecce 73010, Italy
4Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Via Re David 200, 70125 Bari, Italy

Tài liệu tham khảo

Tanabe, 2005, All-optical switches on a silicon chip realized using photonic crystal nanocavities, Appl. Phys. Lett., 87, 151112, 10.1063/1.2089185 Van Laere, 2009, Nanophotonic polarization diversity demultiplexer chip, J. Lightwave Technol., 27, 417, 10.1109/JLT.2008.929414 Stomeo, 2008, Integration of grating couplers with a compact photonic crystal demultiplexer on an InP membrane, Opt. Lett., 33, 884, 10.1364/OL.33.000884 Stomeo, 2010, Optical filter based on two coupled PhC GaAs-membranes, Opt. Lett., 35, 411, 10.1364/OL.35.000411 Makarova, 2006, Silicon-based photonic crystal nanocavity light emitters, Appl. Phys. Lett., 89, 221101, 10.1063/1.2396903 Shambat, 2010, Tunable-wavelength second harmonic generation from GaP photonic crystal cavities coupled to fiber tapers, Opt. Expr., 18, 12176, 10.1364/OE.18.012176 Corcoran, 2009, Green light emission in silicon through slow-light enhanced third-harmonic generation in photonic-crystal waveguides, Nat. Photonics, 3, 206, 10.1038/nphoton.2009.28 Choi, 2005, GaN blue photonic crystal membrane nanocavities, Appl. Phys. Lett., 87, 243101, 10.1063/1.2147713 Rivoire, 2008, Gallium phosphide photonic crystal nanocavities in the visible, Appl. Phys. Lett., 93, 063103, 10.1063/1.2971200 Martiradonna, 2008, Two-dimensional photonic crystal resist membrane nanocavity embedding colloidal dot-in-a-rod nanocrystals, Nanoletters, 8, 260, 10.1021/nl0725751 Gong, 2010, Photonic crystal cavities in silicon dioxide, Appl. Phys. Lett., 96, 031107, 10.1063/1.3297877 Si3N4 refractive index (nSiN) and extinction coefficient (kSiN) were measured through spectrophotometric and ellipsometric methods (Woollam M-2000XI ellipsometer) giving value of n=1.93 and k=0 at a wavelength λ=600nm. Vamvakas, 2007, Optical characterization of Si-rich silicon nitride films prepared by low pressure chemical vapor deposition, Microelectron. Reliab., 47, 794, 10.1016/j.microrel.2007.01.073 Schmidt, 2001, Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride, Sol. Energy Mater. Sol. Cells, 65, 585, 10.1016/S0927-0248(00)00145-8 Yoona, 2007, Refractive index and etched structure of silicon nitride waveguides fabricated by PECVD, Thin Solid Films, 515, 5004, 10.1016/j.tsf.2006.10.059 Mui, 1991, Electrica characteristics of Si3N4/Si/GaAs metal–insulator–semiconductor capacitor, Appl. Phys. Lett., 59, 2847, 10.1063/1.105853 Chen, 2006, Metal–insulator–semiconductor structure on low-temperature grown GaAs, Appl. Phys. Lett., 89, 233514, 10.1063/1.2404605 Gaoa, 1997, Bioengineering of silicon nitride, Sens. Actuators B Chem., 38, 38, 10.1016/S0925-4005(96)02125-9 Dauphasa, 2009, Stepwise functionalization of SiNx surfaces for covalent immobilization of antibodies, Thin Solid Films, 517, 6016, 10.1016/j.tsf.2009.05.014 Diao, 2005, A surface modification strategy on silicon nitride for developing biosensors, Anal. Biochem., 343, 322, 10.1016/j.ab.2005.05.010 Barth, 2007, Modification of visible spontaneous emission with silicon nitride photonic crystal nanocavities, Opt. Expr., 15, 17231, 10.1364/OE.15.017231 Barth, 2008, Emission properties of high-Q silicon nitride photonic crystal heterostructure cavities, Appl. Phys. Lett., 93, 021112, 10.1063/1.2958346 Eichenfield, 2009, A picogram- and nanometre-scale photonic-crystal optomechanical cavity, Nature, 459, 550, 10.1038/nature08061 Gong, 2010, Observation of transparency of erbium-doped silicon nitride in photonic crystal nanobeam cavities, Opt. Expr., 158, 13863, 10.1364/OE.18.013863 Khan, 2011, Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities, Opt. Lett., 36, 421, 10.1364/OL.36.000421 Andreani, 1999, Strong-coupling regime for quantum boxes in pillar microcavities: theory, Phys. Rev. B, 60, 13276, 10.1103/PhysRevB.60.13276 Pisanello, 2010, Evaluation of oscillator strength in colloidal CdSe/CdS dots-in-rods, Phys. Status Solidi C, 7, 2688, 10.1002/pssc.200983836 Purcell, 1946, Spontaneous emission probabilities at radio frequencies, Phys. Rev., 69, 681 Pisanello, 2010, High-Purcell-factor dipolelike modes at visible wavelengths in H1 photonic crystal cavity, Opt. Lett., 35, 1509, 10.1364/OL.35.001509 Painter, 1999, Two-dimensional photonic band-gap defect mode laser, Science, 284, 1819, 10.1126/science.284.5421.1819 Tandaechanurat, 2008, Increase of Q-factor in photonic crystal H1-defect nanocavities after closing of photonic bandgap with optimal slab thickness, Opt. Expr., 16, 448, 10.1364/OE.16.000448 Pisanello, 2010, Modal selective tuning in a photonic crystal cavity, Superlattices Microstruct., 47, 34, 10.1016/j.spmi.2009.06.003 Match: 5′-Cy3–CTC CCC CAT GCC ATC CTG CG-3′. Mouse monoclonal Anti-Vinculin, Clone hVIN-1, purchased from Sigma Aldrich. Ganesh, 2007, Nat. Nanotechnol., 2, 515, 10.1038/nnano.2007.216 Boroditsky, 1999, Spontaneous emission extraction and Purcell enhancement from thin-film 2-D photonic crystals, J. Lightwave Technol., 17, 2096, 10.1109/50.803000 Kim, 2006, Vertical beaming of wavelength-scale photonic crystal resonators, Phys. Rev. B, 73, 235117, 10.1103/PhysRevB.73.235117 Portalupi, 2010, Planar photonic crystal cavities with far-field optimization for high coupling efficiency and quality factor, Opt. Expr., 18, 16064, 10.1364/OE.18.016064 Martiradonna, 2010, Spectral tagging by integrated photonic crystal resonators for highly sensitive and parallel detection in biochips, Appl. Phys. Lett., 96, 113702, 10.1063/1.3360810 Pisanello, 2010, Parallel and high sensitive photonic crystal cavity assisted read-out for DNA-chips, Microelectron. Eng., 87, 747, 10.1016/j.mee.2009.11.158 Pisanello, 2010, Dots in rods as polarized single photon sources, Superlattices Microstruct., 47, 165, 10.1016/j.spmi.2009.06.009 Pisanello, 2010, Room temperature-dipolelike single photon source with a colloidal dot-in-rod, Appl. Phys. Lett., 96, 033101, 10.1063/1.3291849 De Vittorio, 2010, Recent advances on single photon sources based on single colloidal nanocrystals, Opto-Electron. Rev., 18, 1, 10.2478/s11772-009-0026-7 Qualtieri, 2009, Nonclassical emission from single colloidal nanocrystals in a microcavity: a route towards room temperature single photon sources, New J. Phys., 11, 033025, 10.1088/1367-2630/11/3/033025 Colloidal nanocrystals geometrical parameters: core diameter 2.7nm, shell length ∼32nm. Rico-Garcia, 2005, Multivariate analysis of photonic crystal microcavities with fabrication defects, Proc. SPIE, 5840, 562, 10.1117/12.608709