Silicon carbide MEMS for harsh environments

Proceedings of the IEEE - Tập 86 Số 8 - Trang 1594-1609 - 1998
Mehran Mehregany1, Christian A. Zorman1, N. Rajan1, Chien‐Hung Wu1
1Microfabrication Laboratory, Department of Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, OH, USA

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