Silicon-based optoelectronics

Proceedings of the IEEE - Tập 81 Số 12 - Trang 1687-1706 - 1993
Richard Soref1
1Electromagn. & Reliability Directorate, Rome Air Dev. Center, Hanscom AFB, MA, USA

Tóm tắt

Từ khóa


Tài liệu tham khảo

10.1109/LEOSST.1992.697438

kulick, 1993, Generating 3D from computer chips, OPTICS and PHOTONIC NEWS, 4, 55

10.1063/1.108787

10.1049/el:19920275

fan, 1993, Epitaxial liftoff processes for III-V optoelectronics, DARPA Optics Review

10.1364/OFC.1992.WG1

10.1109/50.124502

1993, Quarterly Status Report

10.1049/el:19910689

10.1364/AO.31.006823

1993, DARPA Optics Review

ticknor, 1993, Nonlinear organic electrooptical devices, DARPA Optics Review

10.1063/1.109252

kimerling, 1993, Phase stability and optical properties of the Er:Si system, Proc Material Res Soc Spring Meeting

10.1063/1.106261

10.1109/LEOSST.1992.697515

10.1088/0268-1242/7/9/001

wang, 1993, private communication from UCLA

strane, 1992, Metastable SiGeC alloys formed by solid phase epitaxy, Mater Res Soc Fall Mtg Abstract Book

1989, Semiconductor device with crystalline silicon-germanium-carbon alloy

madelung, 1991, Springer Verlag Data in Science and Engineering

10.1063/1.107619

10.1103/PhysRevLett.55.765

10.1049/el:19901059

soref, 1992, SiGeC cubic alloys for lattice-matched optoelectronic heterostructures

10.1117/12.132400

10.1109/68.157129

10.1109/68.196022

10.1063/1.108768

10.1063/1.106638

polman, 1993, Incorporation of high concentrations of erbium in crystalline silicon: structural, optical and electrical characterization, Proc Spring Meeting Materials Research Society

10.1063/1.108894

10.1364/OFC.1992.WG2

10.1063/1.347704

he, 1993, Synthesis of Si<subscript>y</subscript>(Sn<subscript>x</subscript>C<subscript>1-x</subscript>) 1-<subscript>y</subscript> alloys by molecular beam epitaxy and solid phase epitaxy, Proc Spring Meeting Materials Research Society, 10.1557/PROC-298-229

10.1364/AO.28.001602

10.1063/1.349403

palik, 1985, Handbook of Optical Constants of Solids

spitzer, 1957, Infrared absorption in n-type silicon, Phys Rev, 108, 268, 10.1103/PhysRev.108.268

palik, 1991, Handbook of Optical Constants of Solids II

racanelli, 1991, Ultrahigh-vacuum CVD epitaxy of silicon and Ge<subscript>x</subscript>Si<subscript>1-x</subscript>, J Metals

bean, 1992, A comparison of Ge<subscript>x</subscript>Si<subscript>1-x</subscript> growth technologies, Mater Res Soc Fall Mtg Abstract Book

10.1063/1.347082

10.1063/1.102824

10.1049/el:19921435

yablonovich, 1993, Chem-mechanical planarization of processed silicon wafers for bonding of GaAs epitaxial liftoff films, DARPA Optics Review

0

culshaw, 1990, Micromachined silicon?A synergistic approach to optical fiber sensing?, Proc 7th Optical Fiber Sensors Conf, 249

0

magel, 1993, Optical control of phased arrays: Optical time delay network, DARPA Optics Review

scott, 1993, Micro-machines hold promise for aerospace, Aviation Week & Space Tech, 138, 36

10.1109/IEDM.1990.237118

10.1063/1.1754666

kesan, 1991, Mat Res Soc Symp Proc, 220, 483, 10.1557/PROC-220-483

lorenzo, 1987, Silicon injection-mode 1.3 micron electro-optical switching, Dig Papers OSA Topical Conf on Photonic Switching

10.1063/1.98887

lorenzo, 1988, Photonic Switching

1993, Quantum nanocrystals

10.1049/el:19910079

stabile, 1992, Optically controlled millimeter-wave dielectric waveguides using Silicon-on-Sapphire technology, Conf on Lasers and Electrooptics '92

polifko, 1992, The merging of photonic and microwave technologies, Microwave J, 35, 75

10.1109/22.44120

10.1109/DRC.1993.1009564

10.1088/0268-1242/7/7/001

10.1109/101.121310

10.1049/el:19930273

10.1109/DRC.1993.1009629

10.1063/1.353181

10.1063/1.110018

10.1103/PhysRevB.43.8990

10.1088/0268-1242/8/8/001

zhang, 1993, Light emission from crystalline silicon and amorphous silicon oxide (SiO<subscript>x</subscript>) nanoparticles, Electronic Materials Conf

10.1063/1.106208

10.1049/el:19860562

normandin, 1988, Integrated all-optical modulator and logic gate for liber optic systems, Integrated and Guided-Wave Optics Meeting OSA Tech Dig Series, 10.1364/IGWO.1988.WC7

10.1063/1.352380

10.1557/PROC-220-299

kasper, 1991, Willardson-Beer Semiconductors and Semimetals Strained-Layer Superlattices Materials Science and Technology, 33

10.1109/5.168668

10.1364/AO.31.004627

10.1109/55.31666

10.1080/10408438908243745

bloom, 1993, High speed light modulators: Deformable-grating light valves, DARPA Optics Review

10.1049/el:19920180

10.1109/MC.1987.1663444

10.1109/55.225569

treitinger, 1993, Silicon bipolar technology and circuits for optical communications at data rates above 10 Gb/s, Optic Fiber Conf 93, 10.1364/OFC.1993.FF3

10.1109/55.61782

10.1049/el:19930278

10.1063/1.108693

10.1063/1.110780

10.1049/el:19920060

10.1063/1.106725

10.1049/el:19920099

10.1063/1.349276

soref, 1990, Optical waveguiding in Si/Ge<subscript>x</subscript>Si<subscript>1-x</subscript>/Si, Annu Meet Opt Soc Amer, 10.1364/OAM.1990.FJJ1

10.1364/OL.15.000270

10.1049/el:19920912

albares, 1986, Silicon-on-sapphire waveguides, SPIE Proc, 704, 23

10.1049/el:19921425

10.1063/1.104773

soref, 1989, Light-by-light modulation in silicon-on-insulator waveguides, Proc IGWO '89, 4, 86

10.1109/68.68035

hull, 1991, Semiconductors and Semimetals, 33

10.1109/5.135380

10.1109/EUMA.1991.336420

jalaii, 1993, private communication from UCLA

10.1049/el:19850673

soref, 1986, Epitaxial silicon guided-wave components for ? = 1.3 ?m, OSA Integrated and Guided-Wave Optics Conf Dig Papers, 10.1364/IGWO.1986.WDD5

10.1109/JQE.1986.1073057

10.1364/OL.12.000753

10.1117/12.963332

10.1109/DRC.1993.1009628

0

10.1364/IPR.1992.TuA4

10.1063/1.106655

pankove, 1993, Impact excitation of rare earths in semiconductors, Proc Spring Meeting Materials Research Society

1993, Annual report

10.1109/3.83406

10.1007/BF00611443

10.1364/OL.15.000792

10.1557/PROC-147-241

cortesi, 1990, Optical waveguiding in multiple silicon-on-insulator layers, Int Conf on Electronic Materials

10.1109/3.166458

10.1109/50.296180

10.1117/12.142080

10.1016/0921-5107(91)90177-W

1989, Heterostructures on Silicon One Step Further With Silicon, 137

10.1063/1.106774

10.1109/3.119511

10.1109/3.119511

10.1109/SOI.1989.69790

10.1063/1.106262

10.1049/el:19910930

soref, 1990, Vertical 3D integration of silicon waveguides in a Si-SiO<subscript>2</subscript>-Si-SiO<subscript>2</subscript>-Si structure, SPIE Proc, 1389

10.1557/PROC-244-387

10.1109/68.149893

10.1109/50.293976

10.1109/68.68036

10.1109/SOI.1991.162857

robinson, 1991, Silicon-on-insulator photonics

10.1063/1.109860

1993, Mater Res Soc Bulletin, xviii, 22

canham, 1992, Progress towards Si-based electroluminescent devices, Mater Res Soc Fall Mtg Abstract Book

10.1063/1.337947

1987, SPIE Proc, 792, 222, 10.1117/12.940844

1993, Interim Reports on Special Contract

churenkov, 1992, Self-excitation of microresonators, Int J Optoelectron (UK), 7

vincliaut, 1993, Fast reconfigurable InP digital optical switch, Optical Fiber Conf /IOOC

10.1049/el:19890784

10.1063/1.351813

10.1109/49.87639

10.1109/68.59336

10.1063/1.351844

10.1063/1.106165

10.1049/el:19901226

10.1063/1.109508

friedman, 1993, Intrasubband 1.55 ?m electrooptical modulation in SiGc asymmetric quantum well structures, Mater Res Soc Spring Meet MRS Proc, 10.1557/PROC-298-63

10.1557/PROC-298-63

10.1116/1.585778

10.1116/1.584813

10.1038/364019a0

10.1109/68.248427

10.1063/1.108161

10.1063/1.108061

10.1109/55.55258

10.1063/1.106319

10.1038/scientificamerican0392-78

10.1109/55.82065

10.1063/1.107688

10.1063/1.109283

foss, 1993, Letter to the Editor, Laser Focus World, 29, 67

wood, 1993, Micromachined bolometer arrays achieve low-cost imaging, Laser Focus World, 20, 101

abstreiter, 1992, Engineering the future of electronics, Physics World (UK), 5, 36, 10.1088/2058-7058/5/3/29

10.1109/68.229806

10.1063/1.108755

10.1557/PROC-301-87

10.1063/1.106734

10.1063/1.107648

1986, SPIE Proc, 704, 32

palmour, 1992, 6H-silicon-carbide devices and applications, Proc 7th Trieste Semiconductor Symp - Wide Bandgap Semiconductors

plant, 1993, Optoelectronic mm-wave sources, Microwave J, 36, 62

10.1109/JQE.1987.1073206

canham, 1992, Silicon optoelectronics at the end of the rainbow?, Physics World (UK), 5, 41, 10.1088/2058-7058/5/3/30

10.1063/1.354851

soref, 1993, Electrooptical modulation in SiGe/Si and related heterostructures, Int J Opto-Electron (UK), 8

10.1063/1.108651

10.1049/el:19920051

10.1364/OL.17.001812

10.1557/PROC-281-401

konig, 1992, Advances in Solid State Physics, 32, 199, 10.1007/BFb0108629

10.1557/PROC-281-387

soref, 1992, Silicon-based optical-microwave integrated circuits, Microwave J, 35, 230

10.1109/5.248958

soref, 1988, Silicon guided-wave optics, Solid State Technol, 31, 95

10.1049/el:19860629

1991, Silicon-based rib waveguide optical modulator

10.1063/1.349271

1988, Silicon Photonics

10.1063/1.108444

zelikson, 1992, Electrooptic effect in an amorphous silicon core waveguide structure, Conf on Lasers and Electrooptics '92

10.1063/1.105338

10.1063/1.353134

10.1109/50.4021

10.1063/1.109049

10.1109/55.82059

10.1109/68.229806

10.1063/1.339878

10.1063/1.102834

10.1147/rd.342.0162

10.1109/68.79763