SiC materials-progress, status, and potential roadblocks
Tóm tắt
SiC materials are currently metamorphosing from research and development into a market driven manufacturing product. SiC substrates are currently used as the base for a large fraction of the world production of green, blue, and ultraviolet light-emitting diodes (LEDs). Emerging markets for SiC homoepitaxy include high-power switching devices and microwave devices for S and X band. Applications for heteroepitaxial GaN-based structures on SiC substrates include LEDs and microwave devices. In this paper we review the properties of SiC, assess the current status of substrate and epitaxial growth, and outline our expectations for SiC in the future.
Từ khóa
#Silicon carbide #Substrates #Light emitting diodes #Atomic layer deposition #Stacking #Microwave devices #Epitaxial growth #Thermal resistance #Thermal conductivity #Thermal managementTài liệu tham khảo
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