Secondary ion imaging in the scanning ion microscope

Nuclear Instruments and Methods in Physics Research - Tập 218 - Trang 368-374 - 1983
Riccardo Levi-Setti1, Paul H. La Marche1, Kin Lam1, Thomas H. Shields1, Yuh-Lin Wang1
1Enrico Fermi Institute and Department of Physics, University of Chicago, Chicago, Illinois 60637, USA

Tài liệu tham khảo

Levi-Setti, 1980, 261 Levi-Setti, 1980, Nucl. Instr. and Meth., 168, 139, 10.1016/0029-554X(80)91244-6 Selinger, 1979, Appl. Phys. Lett., 34, 210 Levi-Setti, 1982, Industrial Research and Development, 124 Waugh, 1982, 409 Barofsky, 1982, 425 Rudenauer, 1982, 43 Gnaser, 1982, 401 Levi-Setti, 1983, Nucl. Instr. and Meth., 205, 299, 10.1016/0167-5087(83)90201-6 Levi-Setti, 1982, 417 La Marche, 1983, IEEE Trans. Nucl. Sci. NS-30, 1240, 10.1109/TNS.1983.4332498 Levi-Setti, 1983, Scanning electron microscopy, 1 Fox, 1981, 92 Clampitt, 1981, Nucl. Instr. and Meth., 189, 495 Blaise, 1979, Surf. Sci., 90, 495, 10.1016/0039-6028(79)90358-3 Williams, 1979, Surf. Sci., 90, 588, 10.1016/0039-6028(79)90363-7 Almén, 1961, Nucl. Instr. and Meth., 11, 257, 10.1016/0029-554X(61)90026-X Lindhard, 1969, Vid. Selsk. Mat. Fys. Medd., 36 Sigmund, 1969, Phys. Rev., 184, 383, 10.1103/PhysRev.184.383 Cheshire, 1968, 311, 47 Furuya, 1978, J. Appl. Phys., 49, 3918, 10.1063/1.325399 P.B. Moore, private communication.