Scaling and redundancy for ill-conditioned two input, two output plants
Tài liệu tham khảo
Elta, M., Fournier, J., Freudenberg, J., Giles, M., Grizzle, J., Kabamba, P., Khargonekar, P., Lafortune, S., Meerkov, S., Rashap, B., Terry, F., & Vincent, T. (1993). Real-time feedback control of reactive ion etching. In Proceedings of the 1993 SPIE conference on microelectronics manufacturing, Monterey, CA, September (pp. 438–451).
Golub, 1983
Hsieh, S. C., Stefanopoulou, A. G., Freudenberg, J. S., & Butts, K. R. (1997). Emission and drivability tradeoffs in a variable cam timing si engine with electronic throttle. In Proceedings of the 1997 American control conference, Albuquerque, AZ (pp. 284–288).
Morari, 1985, Robust stability of systems with integral control, IEEE Trans. on Automatic Control, 30, 574, 10.1109/TAC.1985.1104012
Rashap, 1995, Real-time feedback for sidewall profile control in reactive ion etching, Journal of Vacuum Science and Technology A, 13, 1792, 10.1116/1.579770
Rashap, 1995, Control of semiconductor manufacturing equipment: Real-time feedback control of a reactive ion etcher, IEEE Transactions on Semiconductor Manufacturing, 8, 286, 10.1109/66.401003
Skogestad, 1997
Stefanopoulou, 2000, Control of variable geometry turbocharged diesel engines for reduced emissions, IEEE Transactions on Control Systems Technology, 8, 733, 10.1109/87.852917
