Room temperature mass production of carbon nanotube field emission micro-cathode arrays using electroplating of a CNT/Ni composite followed by micro-machining

Vacuum - Tập 85 - Trang 827-832 - 2011
Min Deng1, Guifu Ding1, Yan Wang1, Xuemei Cui1, Hong Wang1, Faheng Zang1, Huiqing Wu1
1National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, PR China

Tài liệu tham khảo

Jung, 2007, Horizontally aligned carbon nanotube field emitters having a long term stability, Carbon, 45, 2917, 10.1016/j.carbon.2007.10.002 Saito, 2000, Field emission from carbon nanotubes and its application to electron sources, Carbon, 38, 169, 10.1016/S0008-6223(99)00139-6 Suh, 2002, Study of the field-screening effect of highly ordered carbon nanotube arrays, Appl Phys Lett, 80, 2392, 10.1063/1.1465109 Wang, 1998, A nanotube-based field-emission flat panel display, Appl Phys Lett, 72, 2912, 10.1063/1.121493 Zhu, 2006, Well-aligned open-ended carbon nanotube architectures: an approach for device assembly, Nano Lett, 6, 243, 10.1021/nl052183z Klinke, 2005, Enhanced field emission from multiwall carbon nanotube films by secondary growth, J Phys Chem B, 109, 21677, 10.1021/jp054110+ Wong, 2005, Fabrication of aligned convex CNT field emission triode by MPCVD, Diam Relat Mater, 14, 2069, 10.1016/j.diamond.2005.09.025 Lee, 2001, Application of carbon nanotubes to field emission displays, Diam Relat Mater, 10, 265, 10.1016/S0925-9635(00)00478-7 Uemura, 1998, Carbon Nanotube FED Elements, JSID, 29, 1052 de Heer, 1995, A Carbon Nanotube Field-Emission Electron Source, Science, 270, 1179, 10.1126/science.270.5239.1179 Rinzler, 1995, Unraveling Nanotubes: Field Emission from an Atomic Wire, Science, 269, 1550, 10.1126/science.269.5230.1550 Fan, 1999, Self-oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties, Science, 283, 512, 10.1126/science.283.5401.512 Normile, 1999, Nanotubes generate Full-Color Displays, Science, 286, 2056, 10.1126/science.286.5447.2056b Lee, 2005, Field-emission enhancement from change of printed carbon nanotube morphology by an elastomer, Appl Phys Lett, 14, 850 Collins, 1996, A simple and robust electron beam source from carbon nanotubes, Appl Phys Lett, 9, 1969, 10.1063/1.117638 Li, 1996, Large-scale synthesis of aligned carbon nanotubes, Science, 274, 1701, 10.1126/science.274.5293.1701 Milnoux, 2005, Achieving high-current carbon nanotube emitters, Nano Lett, 5, 2135, 10.1021/nl051397d Zhao, 1997, Preparation of high-grade carbon nanotubes by hydrogen arc discharge, Carbon, 35, 775, 10.1016/S0008-6223(97)00033-X Davydov, 1999, Field emitters based on porous aluminum oxide templates, J Appl Phys, 86, 3983, 10.1063/1.371317 Kang, 2004, Fabrication temperature effect of the field emission from closed and open tip carbon nanotube arrays fabricated on anodic aluminum oxide films, J Appl Phys, 96, 5234, 10.1063/1.1804622 Han, 2002, Fabrication and characterization of gated field emitter arrays with self aligned carbon nanotubes grown by chemical vapor deposition, Appl Phys Lett, 81, 2070, 10.1063/1.1506408 Dean, 1999, The environmental stability of field emission from single-walled carbon nanotubes, Appl Phys Lett, 75, 3017, 10.1063/1.125219 Kim, 2000, Field emission from carbon nanotubes for displays, Diam Relat Mater, 9, 1184, 10.1016/S0925-9635(99)00266-6 Gao, 2001, Fabrication and electron field emission properties of carbon nanotube films by electrophoretic deposition, Adv Mater, 13, 1770, 10.1002/1521-4095(200112)13:23<1770::AID-ADMA1770>3.0.CO;2-G Kurnosov, 2003, Influence of the interelectrode distance in electrophoretic cold cathode fabrication on the emission uniformity, Appl Surf Sci, 215, 232, 10.1016/S0169-4332(03)00307-6 Oh, 2004, Liquid-phase fabrication of patterned carbon nanotube field emission cathodes, Appl Phys Lett, 84, 3738, 10.1063/1.1737074 Choi, 2001, Electrophoresis deposition of carbon nanotubes for triode type field emission display, Appl Phys Lett, 78, 1547, 10.1063/1.1349870 Bae, 2002, Field emission properties of carbon nanotubes deposited by electrophoresis, Physica B, 323, 168, 10.1016/S0921-4526(02)00890-6 Wang, 2008, Field emission properties of Ag/SiO2/carbon nanotube films by pulsed voltage co-electrophoretic deposition, Thin Solid Films, 26, 436 Choi, 1999, Fully sealed, high-brightness carbon-nanotube field-emission display, Appl Phys Lett, 75, 3129, 10.1063/1.125253 Bonard, 1998, Field emission from single-wall carbon nanotube films, Appl Phys Lett, 73, 918, 10.1063/1.122037 Deng, 2009, Fabrication of Ni-matrix carbon nanotube field emitters using composite electroplating and micromachining, Carbon, 47, 3466, 10.1016/j.carbon.2009.08.014 Wu, 2009, Fabrication and Field Emission Properties of Triode-Type Carbon Nanotube Emitter Arrays, Nano Lett, 9, 595, 10.1021/nl802777g Nguyen, 2006, The use of anodic aluminium oxide templates for triode-type carbon nanotube field emission structures toward mass-production technology, Nanotechnology, 17, 2156 Hahn, 2006, Fabrication of clean carbon nanotube field emitters, Appl Phys Lett, 88, 3101, 10.1063/1.2185257 Nguyen, 2007, A high-performance triode-type carbon nanotube field emitter for mass production, Nanotechnology, 18, 345 Pirio, 2002, Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrode, Nanotechnology, 13, 143 Hu, 2002, Fabrication and Characterization of Vertically Aligned Carbon Nanotubes on Silicon Substrates Using Porous Alumina Nanotemplates, J Nanosci. Nanotechnol, 2, 203, 10.1166/jnn.2002.104 Jang, 2003, Suppression of leakage current via formation of a sidewall protector in the microgated carbon nanotube emitter, Nanotechnology, 14, 497, 10.1088/0957-4484/14/5/303 Uh, 2004, Low Turn-On Voltage Field Emission Triodes with Selectively Grown Carbon Nanotube Emitters, J Kor Phys Soc, 45, 516 Xu, 1999, A method for fabricating large-area, patterned, carbon nanotube field emitters, Appl Phys Lett, 74, 2529, 10.1063/1.123894 Wan, 2005, Patterned carbon nanotube field emitter using the regular array of an anodic aluminum oxide template, Nanotechnology, 16, 291, 10.1088/0957-4484/16/5/029