Rf reactive sputtering of indium-tin-oxide films

Vacuum - Tập 36 - Trang 479-482 - 1986
V Tvaroěk1, I Novotný1, R Harman1, J Kováč1
1Microelectronics Department, Slovak Technical University, Vazovova 5, 812 19 Bratislava, Czechoslovakia