Revisiting the water-use efficiency performance for microelectronics manufacturing facilities: Using Taiwan’s Science Parks as a case study

Aldaco, 2007, Calcium fluoride recovery from fluoride wastewater in a fluidized bed reactor, Water Res., 41, 810, 10.1016/j.watres.2006.11.040 Chang, 2016, Various energy-saving approaches to a TFT-LCD panel fab, Sustainability, 8, 10.3390/su8090907 Cooper, T., Fallender, S., Pafumi, J., Dettling, J., Humbert S., Lessard L. 2011. A semiconductor company’s examination of its water footprint approach. 2011 IEEE International Symposium on Sustainable Systems and Technology (ISSST), Chicago, IL, USA. Cooper, T., Pafumi, J. 2010. Performing a water footprint assessment for a semiconductor industry. Proc. of the 2010 IEEE International Symposium on Sustainable Systems and Technology (ISSST), Arlington, VA, USA. Darwish, 2015, The role of energy to solve water scarcity in Qatar, Desal. Water Treat., 57, 18639, 10.1080/19443994.2015.1103666 Den, 2002, Treatment of organic wastewater discharged from semiconductor manufacturing process by ultraviolet/hydrogen peroxide and biodegradation, IEEE Trans. Semicond. Manuf., 15, 540, 10.1109/TSM.2002.804903 Gabarrón, 2014, Assessment of energy-saving strategies and operational costs in full-scale membrane bioreactors, J. Environ. Manage., 134, 8, 10.1016/j.jenvman.2013.12.023 Global Water Intelligence, 2012 Hsia Lo, C. 2010. A Study on Rational Water Reuse Rate in High-Tech Industry. Master Thesis, Department of Civil Engineering, National Taiwan University (in Chinese). Hu, 2003, Power consumption of semiconductor fabs in Taiwan, Energy, 28, 895, 10.1016/S0360-5442(03)00008-2 Hu, 2008, Power consumption benchmark for a semiconductor cleanroom facility system, Energy Build., 40, 1765, 10.1016/j.enbuild.2008.03.006 Hua, 2013, Life cycle assessment of high-technology buildings: energy consumption and associated environmental impacts of wafer fabrication plants, Energy Build., 56, 126, 10.1016/j.enbuild.2012.09.023 Huang, 1999, Precipitate flotation of fluoride-containing wastewater from a semiconductor manufacturer, Water Res., 33, 3403, 10.1016/S0043-1354(99)00065-2 Institute for Sustainable Futures, 2013, Saving water and spending energy? Lambooy, 2011, Corporate social responsibility: sustainable water use, J. Clean. Prod., 19, 852, 10.1016/j.jclepro.2010.09.009 Lee, 2017, Water-energy nexus for urban water systems: a comparative review on energy intensity and environmental impacts in relation to global water risks, Appl. Energy, 205, 589, 10.1016/j.apenergy.2017.08.002 Lee, 2017, Evaluation of external virtual water export and dependency through crop trade: an Asian case study, Paddy Water Environ, 15, 525, 10.1007/s10333-016-0569-4 Liaw, 2004, Rational Industrial Water Reuse Ratio, J. Am. Water Resour. Assoc., 40, 971, 10.1111/j.1752-1688.2004.tb01060.x Lin, W.-L., Chang, A.S. 2016. Correlation between energy and water consumptions in semiconductor fabs. The 20th Symposium on Construction Engineering and Management, Taiwan (in Chinese). Lin, 2015, Identifying water recycling strategy using multivariate statistical analysis for high-tech industries in Taiwan, Res. Conserv. Recycl., 94, 35, 10.1016/j.resconrec.2014.11.007 Liu, 2008, Analysis of trace contamination of phthalate esters in ultrapure water using a modified solid-phase extraction procedure and automated thermal desorption-gas chromatography/mass spectrometry, J. Chromatogr. A, 1188, 286, 10.1016/j.chroma.2008.02.078 Liu, 2010, Life cycle assessment of DRAM in Taiwan’s semiconductor industry, J. Clean. Prod., 18, 419, 10.1016/j.jclepro.2009.10.004 Longo, 2016, Monitoring and diagnosis of energy consumption in wastewater treatment plants. A state of the art and proposals for improvement, Appl. Energy, 179, 1251, 10.1016/j.apenergy.2016.07.043 Lu, 2018, Strategic optimization of water reuse in wafer fabs via multi-constraint linear programming technique., Water.-Energy Nexus, 1, 86, 10.1016/j.wen.2018.07.004 Morrison, 2010 Nakata, 2017, Particle adsorption onto Si-based wafers in ultrapure water: its mechanism and effect of carbon dioxide, IEEE Trans. Semicond. Manuf., 30, 371, 10.1109/TSM.2017.2759323 Ng, 2013, Adsorption desalination: an emerging low-cost thermal desalination method, Desalination, 308, 161, 10.1016/j.desal.2012.07.030 Pan, 2011, Cost-benefit analysis and optimization of semiconductor processing water recycling strategy, Appl. Mech. Mater., 71–78, 2772, 10.4028/www.scientific.net/AMM.71-78.2772 Park, 2008 Pillai, U. 2011. Analysis of energy consumption in fabs. International SEMATECH Manufacturing Initiative. Albany, NY, USA. Plappally, 2012, Energy requirements for water production, treatment, end use, reclamation, and disposal, Renewable Sustainable Energy Rev., 16, 4818, 10.1016/j.rser.2012.05.022 Ruth, 2016, Quality control for ultrafiltration of ultrapure water production for high end semiconductor manufacturing, 16 Sanders, 2012, Evaluating the energy consumed for water use in the United States, Environ. Res. Lett. 7, art SEMI World Fab Forecast, 2015 Su, 2014, Performance of integrated membrane filtration and electrodialysis processes for copper recovery from wafer polishing wastewater, J. Water Proc. Eng., 4, 149, 10.1016/j.jwpe.2014.09.012 Testa, 2011, Retreatment of silicon slurry by membrane processes, J. Hazard. Mater., 192, 440, 10.1016/j.jhazmat.2011.05.016 Wakeel, 2016, Energy consumption for water use cycles in different countries: a review, Appl. Energy, 178, 868, 10.1016/j.apenergy.2016.06.114 Wang, 2014, Competitive strategies for Taiwan’s semiconductor industry in a new world economy, Technol. Soc., 36, 60, 10.1016/j.techsoc.2013.12.002 Williams, 2002, The 1.7 kilogram microchip: energy and material use in the production of semiconductor devices, Environ. Sci. Technol., 36, 5504, 10.1021/es025643o World Semiconductor Council (WSC), Joint Statement of the 20th Meeting, May 26, 2016, Seoul, Korea. Xiao, 2014, Advanced treatment of semiconductor wastewater by combined MBR–RO technology, Desalination, 336, 168, 10.1016/j.desal.2013.09.005