Retrieval of a wave front with small deformations from a sample of interferograms with a variable number and orientation of interference fringes

Atmospheric and Oceanic Optics - Tập 24 - Trang 572-578 - 2011
V. G. Maksimov1, G. V. Simonova1, V. A. Tartakovskii1
1Institute of Monitoring of Climatic and Ecological Systems, Siberian Branch, Russian Academy of Sciences, Tomsk, Russia

Tóm tắt

A new approach to phase retrieval from an interferogram through the application of the classical fringe tracing method to a sample in which interference fringes change their number and orientation is proposed. Wave fronts retrieved from individual interferograms are averaged, and the quality of the studied surface is judged by the estimate found. Phase averaging over several interferograms allows a decrease in the error variance for the retrieved phase, caused not only by random noise, but also nonuniformity of the aperture covering by interference fringes and light source heterogeneity. Results of model experiments carried out show prospects for interferometry in the nanometrology of high-quality optical components.

Tài liệu tham khảo

E. A. Vitrichenko, V. P. Lukin, L. A. Pushnoi, and V. A. Tartakovskii, Problems of Optical Control (Nauka, Novosibirsk, 1990) [in Russian]. N. I. Krainyukov and A. G. Khramov, “The Method for Detecting the Centers of Fringes on a Two-Dimensional Hologram”, Komp. Opt., Nos. 10–11, 150–159 (1992). A. V. Belyakov, “Analyzing Interference-Fringe Patterns by Discriminating the Features of Wavelet Maps of Symmetric Wavelets,” J. Opt. Technol. 73, 183–187 (2006). A. Anand, “Tracing of Interference Fringes Using Average Gray Value and Simultaneous Row and Column Scan,” Opt. Laser Technol. 35(2), 73–79 (2003). V. A. Gorshkov, A. Yu. Papaev, A. V. Podobryanskii, “Interferogram-Processing Software for Technological Purposes,” J. Opt. Technol. 69, 111 (2002). A. G. Khadakkar, V. Jyothi, and R. Narayanan, “Fringe Tracing by Image Processing,” Opt. Eng. 33, 1872–1875 (1994). V. G. Maximov, V. A. Tartakovsky, and S. A. Chudinov, “Adaptive Algorithm for Interference Fringe Tracing,” Proc. SPIE 5743, 271–281 (2004). V. P. Koronkevich, G. A. Lenkova, A. E. Matochkin, V. G. Maksimov, V. A. Tartakovskii, and S. A. Chudinov, “Interferometry of Optical Surfaces by Newton Fringes,” Avtometriya 40(6), 33–45 (2004). J. Budzinski, “SNOP: A Method for Skeletonization of a Fringe Pattern Along the Fringe Direction,” Appl. Opt. 31, 3109–3113 (1992). J. C. Wyant and K. Creath, “Basic Wavefront Aberration Theory for Optical Metrology,” in Applied Optics and Optical Engineering, Ed. by R. Shannon and J. Wyant (Academic Press, New York, 1992), Vol. 11, pp. 28–39. V. I. Guzhov and S. P. Il’inykh, Computer Interferometry (Novosib. Gos. Tekh. Univ., Novosibirsk, 2004) [in Russian]. V. G. Maximov, V. A. Tartakovsky, and S. A. Chudiniv, “Edge Effect Reduction for Interference Fringe Tracer,” Proc. SPIE 6160, 616012-1–4 (2005). A. G. Poleshchuk, R. K. Nasyrov, A. E. Matochkin, V. V. Cherkashin, V. G. Maksimov, and V. A. Tartakovskii, “Measurement Complex for High Quality Optical Control,” in Proceedings of the 9th International Conference on Applied Optics 2010 (St.-Petersburg, 2010), Pt. 2, pp. 129–136.