Resonant silicon structures
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Sauerbrey, 1959, Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung, Z. Phys., 155, 206, 10.1007/BF01337937
Hlavay, 1977, Applications of the piezoelectric crystal detector in analytical chemistry, Anal. Chem., 49, 1890, 10.1021/ac50021a007
EerNisse, 1986, A resonator temperature transducer with no activity dips, 40th Annual Frequency Control Symp., Philadelphia, PA, U.S.A., 216, 10.1109/FREQ.1986.200945
Ueda, 1986, Temperature sensor using quartz tuning fork resonator, 40th Annual Frequency Control Symp., Philadelphia, PA, U.S.A., 224, 10.1109/FREQ.1986.200946
Paros, 1973, Precision digital pressure transducer, ISA Trans., 12, 173
Langdon, 1985, Resonator sensors — a review, J. Phys. E: Sci. Instrum., 18, 103, 10.1088/0022-3735/18/2/002
Smits, 1983, Resonant diaphragm pressure measurement system with ZnO on Si excitation, Sensors and Actuators, 4, 565, 10.1016/0250-6874(83)85068-9
Greenwood, 1984, Etched silicon vibrating sensor, J. Phys. E: Sci. Instrum., 17, 650, 10.1088/0022-3735/17/8/007
Howe, 1986, Resonant-microbridge vapor sensor, IEEE Trans. Electron Dev., ED-33, 499, 10.1109/T-ED.1986.22519
Wölfelschneider, 1987, Optically excited and interrogated micromechanical silicon cantilever structure, Fiber Optic Sensors II, SPIE, 798, 61, 10.1117/12.941086
Szabo, 1984, 341
Sandmaier, 251987, A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation, 4th Int. Conf. on Solid-State Sensors and Actuators, (Transducers '87), Tokyo, Japan
Szabo, 1984, 112
Lee, 1982, Modeling simulation of solid-state pressure sensors
Buser, 1986, Realization of a mesa array in (001) oriented silicon wafers for tactile sensing applications, Ext. Abstr. Fall Meet. Electrochem. Soc., San Diego, CA, U.S.A., 879
Willemin, 1983, Interférométrie hétérodyne de speckles: Application à la mesure de vibration mécanique microscopique
Andres, 1987, Nonlinear vibrations hysteresis of micromachined silicon resonators designed as frequency out sensors, Electron Lett., 23, 952, 10.1049/el:19870670
Kokubun, 1984, A bending stretching mode crystal oscillator as a friction vacuum gauge, Vacuum, 34, 731, 10.1016/0042-207X(84)90318-X
Christen, 1983, Air and gas damping of quartz tuning forks, Sensors and Actuators, 4, 555, 10.1016/0250-6874(83)85067-7
Kokubun, 1985, Frequency dependence of a quartz oscillator on gas pressure, J. Vac. Sci. Technol., A3, 2184, 10.1116/1.573275
R. Buser, to be published.