Resonant silicon structures

Sensors and Actuators - Tập 17 Số 1-2 - Trang 145-154 - 1989
R.A. Buser1, Ν. F. de Rooij1
1Institute of Microtechnology, University of Neuchâtel, rue A.L. Breguet 2, CH-2000 Neuchâtel Switzerland

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Tài liệu tham khảo

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R. Buser, to be published.

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