Reactive sputtered Ta2O5 antireflection coatings

Revesz, 1973, COMSAT Tech. Rev., 3, 449 Bragagnolo, 1981, J. Vac. Sci. Technol., 18, 364, 10.1116/1.570786 Revesz, 1976, COMSAT Tech. Rev., 6, 57 Hoffman, 1976, Solid State Technol., 19, 57, 10.1016/0038-1101(76)90134-9 Vratny, 1967, J. Electrochem. Soc., 114, 505, 10.1149/1.2426636 Schiller, 1979, Thin Solid Films, 63, 369, 10.1016/0040-6090(79)90042-7 Albella, 1975, Opt. Acta, 22, 973, 10.1080/713818999 Tomlin, 1968, J. Phys. D, 1, 1667, 10.1088/0022-3727/1/12/312 Denton, 1972, J. Phys. D, 5, 852, 10.1088/0022-3727/5/4/329 Heavens, 1955 Rubio, 1982, J. Vac. Sci. Technol., 21, 1043, 10.1116/1.571862 Yeh, 1976, J. Appl. Phys., 47, 4107, 10.1063/1.323270 Smith, 1981, IEEE Trans. Electron Devices, 28, 22, 10.1109/T-ED.1981.20277 Archer, 1962, J. Opt. Soc. Am., 52, 970, 10.1364/JOSA.52.000970