Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser

Journal of Materials Research - Tập 8 Số 9 - Trang 2265-2272 - 1993
Fulin Xiong1, Y.Y. Wang1, Valerie J. Leppert1, R. P. H. Chang1
1Northwestern University

Tóm tắt

We have deposited hydrogen-free diamond-like amorphous carbon films by ArF (193 nm) pulsed laser ablation of graphite. The deposition process is performed with a laser power density of only 5 × 108W/cm2at room temperature without any auxiliary energy source incorporation. The resulting films possess remarkable physical, optical, and mechanical properties that are close to those of diamond and distinct from the graphite target used. The films have a mechanical hardness up to 38 GPa, an optical energy band gap of 2.6 eV, and excellent thermal stability. Analysis of electron energy loss spectroscopy reveals the domination of diamond-type tetrahedral bonding structure in the films with thesp3bond fraction over 95%. Compared with other reported results of pulsed-laser-deposited diamond-like carbon films, our experimental results confirm that the laser wavelength or photon energy plays a crucial role in controlling the properties of the pulsed-laser-deposited diamond-like carbon films.

Từ khóa


Tài liệu tham khảo

32 Murray P. T. , private communication.

Doll, 1990, Laser Ablation for Materials Synthesis, 191, 129

10.1080/10408438808244625

10.1557/JMR.1989.0385

Lin-Vien, 1991, The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules

Silverstein, 1991, Spectrometric Identification of Organic Compounds, 91

10.1080/09500838808214715

10.1063/1.336672

Feldman, 1986, Fundamentals of Surface and Thin Films Analysis, 59

10.1063/1.349540

10.1557/JMR.1989.1238

10.1063/1.101070

Pouch, 1990, Properties and Characterization of Amorphous Carbon Films, 52, 10.4028/b-Y46rB4

10.1126/science.241.4868.913

Demers, 1990, Diamond Optic II, 1146, 68, 10.1117/12.962063

10.1007/BF00617942

10.1116/1.577252

Marquardt, 1985, Plasma Synthesis and Etching of Electronic Materials, 38, 325

Murray, 1992, Phase Formation and Modification by Beam-Solid Interactions, 235, 825

10.1063/1.101999

10.1063/1.333135

Borghesi, 1991, Handbook of Optical Constants of Solids II, 449

10.1063/1.34715

10.1063/1.345566

10.1063/1.1674108

10.1063/1.347519

10.1063/1.350501

10.1116/1.574188

10.1557/S0883769400040586

10.1016/0040-6090(82)90189-4

10.1007/3540128077_3

10.1016/B978-0-08-054721-3.50035-6

Thebert-Peeler, 1992, Phase Formation and Modification by Beam-Solid Interactions, 235, 879