Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser
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32 Murray P. T. , private communication.
Doll, 1990, Laser Ablation for Materials Synthesis, 191, 129
Lin-Vien, 1991, The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules
Silverstein, 1991, Spectrometric Identification of Organic Compounds, 91
Feldman, 1986, Fundamentals of Surface and Thin Films Analysis, 59
Marquardt, 1985, Plasma Synthesis and Etching of Electronic Materials, 38, 325
Murray, 1992, Phase Formation and Modification by Beam-Solid Interactions, 235, 825
Borghesi, 1991, Handbook of Optical Constants of Solids II, 449
Thebert-Peeler, 1992, Phase Formation and Modification by Beam-Solid Interactions, 235, 879