Pseudoline electron beam recrystallization of silicon-on-insulator

Materials Science Reports - Tập 3 - Trang 219-275 - 1989
Susumu Horita1
1Department of Electrical and Computer Engineering, Faculty of Technology, Kanazawa University, 2-40-20 Kodatsuno, Kanazawa 920, Japan

Tài liệu tham khảo

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