Promoting strain relaxation of Si0.72Ge0.28 film on Si (100) substrate by inserting a low-temperature Ge islands layer in UHVCVD

Applied Surface Science - Tập 255 - Trang 2660-2664 - 2008
Zhiwen Zhou1, Zhimeng Cai1, Cheng Li1, Hongkai Lai1, Songyan Chen1, Jinzhong Yu2
1Semiconductor Photonics Research Center, Department of Physics, Xiamen University, 422 South Siming road, Xiamen, Fujian 361005, People's Republic of China
2State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, People's Republic of China

Tài liệu tham khảo

Minjoo, 2005, J. Appl. Phys., 97, 011101, 10.1063/1.1819976 Fitzgerald, 1991, Appl. Phys. Lett., 59, 811, 10.1063/1.105351 Liu, 2005, Electrochem. Solid-State Lett., 8, G60, 10.1149/1.1848295 Wong, 2006, Appl. Phys. Lett., 88, 041915, 10.1063/1.2165283 Li, 1997, Appl. Phys. Lett., 71, 3132, 10.1063/1.120268 Bauer, 2000, Thin Solid Films, 369, 152, 10.1016/S0040-6090(00)00796-3 Sawano, 2004, Appl. Phys. Lett., 85, 2514, 10.1063/1.1794353 Bolkhovityanov, 2003, Semiconductors, 37, 493, 10.1134/1.1575352 Sakai, 2001, Appl. Phys. Lett., 79, 3398, 10.1063/1.1419037 Kim, 2005, Electrochem. Solid-State Lett., 8, G304, 10.1149/1.2050567 Lutz, 1995, Appl. Phys. Lett., 67, 724, 10.1063/1.115287 Chen, 2002, Phys. Rev. B, 65, 233303, 10.1103/PhysRevB.65.233303 Sawano, 2003, Appl. Phys. Lett., 83, 4339, 10.1063/1.1629142 Myronov, 2007, J. Cryst. Growth, 301–302, 315, 10.1016/j.jcrysgro.2006.11.195 Lee, 2004, J. Vac. Sci. Technol. B, 22, 158, 10.1116/1.1640397 Yamamoto, 2004, Appl. Surf. Sci., 224, 108, 10.1016/j.apsusc.2003.08.082 Lee, 2006, Thin Solid Films, 508, 120, 10.1016/j.tsf.2005.08.395 Shoukri, 2005, Appl. Phys. Lett., 86, 131923, 10.1063/1.1897826 Secco D’Aragona, 1972, J. Electrochem. Soc., 119, 948, 10.1149/1.2404374 Groenen, 1997, Appl. Phys. Lett., 71, 3856, 10.1063/1.120525