Projection micro-stereolithography using digital micro-mirror dynamic mask
Tài liệu tham khảo
Sze, 1994
Becker, 1986, Microelectron. Eng., 4, 35, 10.1016/0167-9317(86)90004-3
Williams, 1999, Technical digest, 232
Cohen, 1999, Technical digest, 244
Ikuta, 1993, Proc. IEEE Micro Electro Mech. Syst., 42
Zhang, 1999, Sens. Actuat. A, 77, 149, 10.1016/S0924-4247(99)00189-2
Maruo, 1999, 173
Jiang, 2000, Sens. Actuat. A, 87, 72, 10.1016/S0924-4247(00)00467-2
Takagi, 1993, Proc. IEEE Micro Electro Mech. Syst., 173
Bertsch, 1997, J. Photochem. Photobiol. A, 107, 275, 10.1016/S1010-6030(96)04585-6
Huang, 1998, Microprocess. Microsyst., 22, 67, 10.1016/S0141-9331(98)00070-2
Larry, 1998, TI Tech. J., 15, 7
Meier, 1998, TI Tech. J., 15, 64
Jacobs, 1992
Hecht, 1988
Kumar, 1968, J. Opt. Soc. Am., 58, 1369, 10.1364/JOSA.58.001369
Arnost, 1989