Projection-Based Iterative Learning Control for Wafer Scanner Systems

IEEE/ASME Transactions on Mechatronics - Tập 14 Số 3 - Trang 388-393 - 2009
Sandipan Mishra1, Masayoshi Tomizuka2
1Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
2Department of Mechanical Engineering, University of California, Berkeley, CA, USA

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IEEE/ASME Transactions on Mechatronics

Tập 14 Số 3

388-393

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