Production of probes with carbon nanotubes
Tóm tắt
A method for producing carbon nanotubes by magnetron sputtering of a carbon target is proposed. It allows modification of traditional probes for probe microscopy using carbon nanotubes, thus substantially improving their characteristics. Probes with nanotubes with a tip radius of rounding of several nanometers can be used for precise scanning, quality control of samples, and nanolithography.
Tài liệu tham khảo
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