Process-parameter optimization of Sb2O3 films in the ultraviolet and visible region for interferometric applications
Tóm tắt
The influence of different evaporation process parameters on the optical properties and constants of thin Sb2O3 films in the ultraviolet and visible region from 250 to 800 nm has been investigated. The most dominant parameters, namely the substrate temperature, rate of evaporation, and ambient oxygen pressure used during the deposition process and the post-annealing temperatures were optimised which resulted in low loss, dense and homogeneous Sb2O3 films. The optical constants and band gaps of these films were evaluated using their interference modulated transmittance spectra in case of both homogeneous and inhomogeneous conditions. Optimized films have been successfully used in developing multilayer high reflecting coatings for Fabry-Perot etalons along with the cryolite (Na3AlF6) films.
Tài liệu tham khảo
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