Preparation of boron-doped semiconducting diamond films using BF3 and the electrochemical behavior of the semiconducting diamond electrodes

Journal of Fluorine Chemistry - Tập 125 - Trang 1715-1722 - 2004
Fujio Okino1, Yukio Kawaguchi1, Hidekazu Touhara1, Kunitake Momota2, Mikka Nishitani-Gamo3, Toshihiro Ando4, Atsushi Sasaki5, Mamoru Yoshimoto5, Osamu Odawara6
1Faculty of Textile Science and Technology, Shinshu University, 3-15-1 Tokida, Ueda 386-8567, Japan
2Department of Research and Development, Morita Chemical Industries Company Limited, Higashimikuni 3-12-10, Yodogawa-ku, Osaka 532-0002, Japan
3Department of Applied Chemistry, Faculty of Engineering, Toyo University, 2100 Kujirai, Kawagoe 350-8585, Japan
4National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
5Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan
6Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8502, Japan

Tài liệu tham khảo

Fujimori, 1986, Vacuum, 36, 99, 10.1016/0042-207X(86)90279-4 Fujimori, 1990, Jpn. J. Appl. Phys., 29, 824, 10.1143/JJAP.29.824 Malta, 1993, Appl. Phys. Lett., 62, 2926, 10.1063/1.109199 Yasu, 1994, Diamond Relat. Mater., 4, 59, 10.1016/0925-9635(94)90069-8 Polo, 1994, Vacuum, 45, 1013, 10.1016/0042-207X(94)90008-6 Yamanaka, 1998, Jpn. J. Appl. Phys., Part 2, 37, L1129, 10.1143/JJAP.37.L1129 Sakharova, 1995, J. Electrochem. Soc., 142, 2704, 10.1149/1.2050078 Vinokur, 1996, J. Electrochem. Soc., 143, L238, 10.1149/1.1837157 Martin, 1996, J. Electrochem. Soc., 143, L133, 10.1149/1.1836901 Okano, 1989, Jpn. J. Appl. Phys., 28, 1066, 10.1143/JJAP.28.1066 Yano, 1998, J. Electrochem. Soc., 145, 1870, 10.1149/1.1838569 Yano, 1999, J. Electrochem. Soc., 146, 1081, 10.1149/1.1391724 Boonma, 1997, J. Electrochem. Soc., 144, L142, 10.1149/1.1837704 Ushizawa, 1998, Diamond Relat. Mater., 7, 1719, 10.1016/S0925-9635(98)00296-9 Patterson, 1991, 433 Patterson, 1992, Diamond Relat. Mater., 1, 768, 10.1016/0925-9635(92)90098-9 Asmann, 1999, Diamond Relat. Mater., 8, 1, 10.1016/S0925-9635(98)00365-3 Ando, 1995, J. Chem. Soc., Faraday Trans., 91, 3209, 10.1039/ft9959103209 Watanabe, 1988 Chen, 1997, J. Electrochem. Soc., 144, 3806, 10.1149/1.1838096 Swain, 1993, Anal. Chem., 65, 345, 10.1021/ac00052a007 Martin, 1996, J. Electrochem. Soc., 143, L133, 10.1149/1.1836901 Boonma, 1997, J. Electrochem. Soc., 144, L142, 10.1149/1.1837704 Yano, 1998, J. Electrochem. Soc., 145, 1870, 10.1149/1.1838569 Okino, 1999, Electrochem. Solid-State Lett., 2, 382, 10.1149/1.1390844 F. Okino, Y. Kawaguchi, S. Kawasaki, H. Touhar, M. Nishitani-Gamo, T. Ando, in: G.M. Swain, T. Ando, J.C. Angus, W.D. Brown, J.L. Davidson, A. Gicquel, W.P. Kang, B.V. Spitsyn (Eds.), Diamond Materials VII, 2001, pp. 103–107. Smith, 1992, 159 Sakaguchi, 1998, Diamond Relat. Mater., 7, 1144, 10.1016/S0925-9635(98)00161-7 Lee, 1999, Diamond Relat. Mater., 8, 251, 10.1016/S0925-9635(98)00384-7 Gonon, 1995, J. Appl. Phys., 78, 7059, 10.1063/1.360410 Bard, 1980 Momota, 1993, Electrochim. Acta, 38, 1123, 10.1016/0013-4686(93)80222-L Momota, 1993, Electrochim. Acta, 38, 619, 10.1016/0013-4686(93)85022-Q Momota, 1995, J. Appl. Electrochem., 25, 651, 10.1007/BF00241926 Okino, 1998, 306
Thông tin
Thông tin xuất bản

Journal of Fluorine Chemistry

Tập 125

1715-1722

Thông tin tác giả