Preparation of In<sub>2</sub>O<sub>3</sub>:Sn (ITO) films by electron beam deposition

Physica Status Solidi A - Tập 102 Số 2 - Trang K91-K94 - 1987
Bich, V.T., Dinh, N.N., Hoai, T.X., Hoang, N.H., Hong, L.V., Mien, V.D.1
1Academy of Sciences of Vietnam, Hanoi. Inst. of Physics

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#ANNEALING; CHEMICAL PREPARATION; CUBIC LATTICES; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; FILMS; INDIUM OXIDES; KEV RANGE 01-10; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; RECRYSTALLIZATION; SUBSTRATES; THICKNESS; TIN OXIDES; TRANSMISSION; X-RAY DIFFRACTION #BEAMS; CHALCOGENIDES; COHERENT SCATTERING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CRYSTALS; DIFFRACTION; DIMENSIONS; ELECTRICAL PROPERTIES; ENERGY RANGE; HEAT TREATMENTS; INDIUM COMPOUNDS; KEV RANGE; LEPTON BEAMS; OXIDES; OXYGEN COMPOUNDS; PARTICLE BEAMS; PHYSICAL PROPERTIES; RADIATION EFFECTS; SCATTERING; SYNTHESIS; TIN COMPOUNDS

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