Precise track-following control using a MEMS tracking mirror in high-density optical disk drives
Tóm tắt
Developed a dual-stage tracking mechanism using a MEMS tracking mirror and used /spl mu/-analysis and synthesis to design a controller satisfying multiple desired specifications. The efficiency of the proposed method was demonstrated by an experiment having tracking errors of less than 10 nm. We expect the MEMS tracking mirror to contribute to the creation of high-density optical disk drives.
Từ khóa
#Optical control #Micromechanical devices #Mirrors #Disk drives #Tracking #Actuators #Design methodology #Production #Motion control #BarsTài liệu tham khảo
10.1109/CLEOPR.2001.970782
ueda, 2001, A micromachined tracking mirror for high-density optical disk memory, Proc Opt MEMS 2001, 67
watanabe, 2000, Single-stage track-following using disturbance learning, Proc of ISOM 2000 Th-E-03, 52