Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts

Royal Society of Chemistry (RSC) - Tập 18 Số 9 - Trang 1015 - 2008
Chia-Lung Lee1, Kazuya Tsujino1, Yuji Kanda1, Shigeru Ikeda1, Michio Matsumura1
1Research Center for Solar Energy Chemistry, Osaka University, 1-3 Machikaneyama,Toyonaka,Japan

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Létant, 2003, Nat. Mater., 2, 391, 10.1038/nmat888

Cruz, 2005, J. Electrochem. Soc., 152, C418, 10.1149/1.1914747

Lin, 2005, IEEE Trans. Semicond. Manuf., 18, 644, 10.1109/TSM.2005.858527

Takahashi, 2001, Jpn. J. Appl. Phys., Part 1, 40, 3032, 10.1143/JJAP.40.3032

Schaper, 2005, IEEE Trans. Adv. Packag., 28, 356, 10.1109/TADVP.2005.853271

Koyanagi, 2006, IEEE Trans. Electron Devices, 53, 2799, 10.1109/TED.2006.884079

Panda, 2003, J. Electrochem. Soc., 150, G612, 10.1149/1.1603254

Rangelow, 2003, J. Vac. Sci. Technol., A, 21, 1550, 10.1116/1.1580488

Lehmann, 1993, J. Electrochem. Soc., 140, 2836, 10.1149/1.2220919

Lehmann, 1999, J. Electrochem. Soc., 146, 2968, 10.1149/1.1392037

Li, 2000, Appl. Phys. Lett., 77, 2572, 10.1063/1.1319191

Xia, 2000, Chem. Mater., 12, 1671, 10.1021/cm9912066

Fang, 2006, Nanotechnology, 17, 3768, 10.1088/0957-4484/17/15/026

Tsujino, 2005, Adv. Mater., 17, 1045, 10.1002/adma.200401681

Tsujino, 2005, Electrochem. Solid-State Lett., 8, C193, 10.1149/1.2109347

Tsujino, 2007, Electrochim. Acta, 53, 28, 10.1016/j.electacta.2007.01.035

Peng, 2006, Adv. Funct. Mater., 16, 387, 10.1002/adfm.200500392

Hadjersi, 2005, Vacuum, 80, 366, 10.1016/j.vacuum.2005.06.013

Yae, 2003, Electrochem. Commun., 5, 632, 10.1016/S1388-2481(03)00146-2

Unno, 1987, J. Electrochem. Soc., 134, 645, 10.1149/1.2100524

Pascual, 2002, J. Porous Mater., 9, 57, 10.1023/A:1014312107140

Hamm, 2003, Electrochemistry, 71, 853, 10.5796/electrochemistry.71.853

O'Neill, 2004, Biosens. Bioelectron., 19, 1521, 10.1016/j.bios.2003.12.004

Ottow, 1998, J. Electroanal. Chem., 455, 29, 10.1016/S0022-0728(98)00189-2

ten Kortenaar, 2001, J. Electrochem. Soc., 148, C28, 10.1149/1.1344536

Liu, 2004, J. Mater. Chem., 14, 1526, 10.1039/b400488b