Polymer matrix composite engineering for PDMS based capacitive sensors to achieve high-performance and broad-range pressure sensing

Segev-Bar, 2013, Flexible sensors based on nanoparticles, ACS Nano, 7, 8366, 10.1021/nn402728g Kumar, 2021, Ultrasensitive and light-activated NO2 gas sensor based on networked MoS2/ZnO nanohybrid with adsorption/desorption kinetics study, Appl. Surf. Sci., 536, 10.1016/j.apsusc.2020.147933 Wei, 2018, Facile fabrication of Ag nanowires for capacitive flexible pressure sensors by liquid polyol reduction method, Mater. Res. Express, 5, 15041, 10.1088/2053-1591/aaa4ed Lee, 2014, A micro-fabricated force sensor using an all thin film piezoelectric active sensor, Sensors, 14, 22199, 10.3390/s141222199 Park, 2014, Giant tunneling piezoresistance of composite elastomers with interlocked microdome arrays for ultrasensitive and multimodal electronic skins, ACS Nano, 8, 4689, 10.1021/nn500441k Mishra, 2019, ZnO/GaN heterojunction based self-powered photodetectors: influence of interfacial states on UV sensing, Appl. Surf. Sci., 478, 1081, 10.1016/j.apsusc.2019.01.192 Lee, 2016, Low-cost flexible pressure sensor based on dielectric elastomer film with micro-pores, Sens. Actuators A Phys., 240, 103, 10.1016/j.sna.2016.01.037 M. Mishra, N. Kumar Bhalla, A. Dash, G. Gupta, Nanostructured GaN and AlGaN/GaN heterostructure for catalyst-free low-temperature CO sensing, 2019. Kumar, 2020, Flexible BSA MIM capacitor with negative voltage coefficient for RF applications, Appl. Phys. Lett., 116, 10.1063/1.5139494 Hota, 2010, Impact of top (Pt, Au, and Al) electrodes on HfAlO x-based MIM capacitors, J. Electrochem. Soc., 158, H44, 10.1149/1.3514656 Bag, 2014, Bipolar resistive switching in different plant and animal proteins, 203 Hota, 2013, Resistive switching in ITO/graphene oxide/Al metal-insulator-metal capacitor structures, Graphene, 1, 45, 10.1166/graph.2013.1010 Huang, 2018, Resistive pressure sensor for high-sensitivity e-skin based on porous sponge dip-coated CB/MWCNTs/SR conductive composites, Mater. Res. Express, 5, 65701, 10.1088/2053-1591/aac8c0 Pruvost, 2018, Microporous electrostrictive materials for vibrational energy harvesting, Multifunct. Mater., 1, 15004, 10.1088/2399-7532/aab2ff El-Molla, 2016, Integration of a thin film PDMS-based capacitive sensor for tactile sensing in an electronic skin, J. Sens., 10.1155/2016/1736169 Ding, 2019, Influence of the pore size on the sensitivity of flexible and wearable pressure sensors based on porous Ecoflex dielectric layers, Mater. Res. Express, 6, 66304, 10.1088/2053-1591/ab091a Jiang, 2014, Applications of micro/nanoparticles in microfluidic sensors: a review, Sensors, 14, 6952, 10.3390/s140406952 Singh, 2016, Low cost fabrication of polymer composite (h-ZnO+ PDMS) material for piezoelectric device application, Mater. Res. Express, 3, 75702, 10.1088/2053-1591/3/7/075702 Rocha, 2018, Fabrication and characterization of bending and pressure sensors for a soft prosthetic hand, J. Micromech. Microeng., 28, 34001, 10.1088/1361-6439/aaa1d8 Bazhenov, 2011, Mechanical behavior of filled thermoplastic polymers, Met. Ceram. Polym. Compos. Var. Uses. Rijeka InTech, 171 Khodaei, 2016, The effect of pore structure on the mechanical properties of titanium scaffolds, Mater. Lett., 171, 308, 10.1016/j.matlet.2016.02.101 G.P. Tandon, G.J. Weng, Stress distribution in and around spheroidal inclusions and voids at finite concentration, (1986). Zhang, 2010, Effect of surface/interface stress on the plastic deformation of nanoporous materials and nanocomposites, Int. J. Plast., 26, 957, 10.1016/j.ijplas.2009.12.002 Zhao, 2019, High sensitivity and broad range flexible pressure sensor using multilayered porous PDMS/AgNP sponge, Adv. Mater. Technol., 4, 10.1002/admt.201900414 Pruvost, 2019, Polymeric foams for flexible and highly sensitive low-pressure capacitive sensors, Npj Flex. Electron., 3, 1, 10.1038/s41528-019-0052-6 Belovickis, 2015, Dielectric spectroscopy of polymer based PDMS nanocomposites with ZnO nanoparticles, Ferroelectrics, 479, 82, 10.1080/00150193.2015.1012016 Dobrzynska, 2012, Polymer-based flexible capacitive sensor for three-axial force measurements, J. Micromech. Microeng., 23, 15009, 10.1088/0960-1317/23/1/015009 Lei, 2012, Development of a flexible PDMS capacitive pressure sensor for plantar pressure measurement, Microelectron. Eng., 99, 1, 10.1016/j.mee.2012.06.005 Zeng, 2014, Transferable self-supporting ZnO porous films for low-cost piezoresistive sensors, Semicond. Sci. Technol., 29, 45009, 10.1088/0268-1242/29/4/045009 Lei, 2014, A flexible PDMS capacitive tactile sensor with adjustable measurement range for plantar pressure measurement, Microsyst. Technol., 20, 1351, 10.1007/s00542-013-1918-5 Zhang, 2014, Dual functional transparent film for proximity and pressure sensing, Nano Res., 7, 1488, 10.1007/s12274-014-0510-3 Greaves, 2011, Poisson's ratio and modern materials, Nat. Mater., 10, 823, 10.1038/nmat3134 Pedersen, 2009, Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance, Sens. Actuators A Phys., 154, 35, 10.1016/j.sna.2009.07.013 Offenzeller, 2018, Embedded, fully spray-coated pressure sensor using a capacitive transducing mechanism, Polym. Basel, 10, 852