Plasma-Deposition of Ag-Containing Polyethyleneoxide-Like Coatings
Tóm tắt
Ag-containing polyethyleneoxide (PEO)-like thin films have been deposited in Radio Frequency Glow Discharges fed with vapors of diethyleneglycol-dimethylether and argon. Proper experimental conditions have been utilized in order to fragment the monomer in the glow and, at the same time, sputter Ag from the silver RF cathode of the reactor, in a way that polyethyleneoxide(PEO)-like coatings with embedded Ag clusters have been deposited at the ground electrode. The compostion of the coatings has been investigated by means of different techniques; the plasma process has been investigated by means of Actinometric Optical Emission Spectroscopy. A correlation has been found between the amount of silver embedded in the coatings and that sputtered in the discharge, monitored by actinometry, that could eventually be utilized to control in situ the deposition process.
Tài liệu tham khảo
K. L. Prime and G. M. Whitesides, J. Am. Chem. Soc., 115, 10714 (1993).
E. E. Johnston, B. D. Ratner, and J. D. Bryers, in Plasma Processing of Polymers, R d'Agostino, P. Favia, and F. Fracassi, eds., NATO ASI Series E: Appl. Science, Kluwer Acad. Publ. (1997).
G. P. Lopez, B. D. Ratner, C. D. Tidwell, C. L. Haycox, R. J. Rapoza, and T. A. Horbett, J. Biomed. Mater. Res., 26, 415 (1992).
A. Oloffs, C. Grosse-Siestrup, S. Bisson, M. Rinck, R. Rudolph, and U. Gross, Biomaterials, 15, 753 (1994).
J. M. Schierholz, L. J. Lucas, A. Rump and G. Pulverer, J. Hosp. Inferface, 40, 257, (1998).
E. Kay, Z. Phys. D, 3, 251 (1986).
H. Biederman and L. Martinu, in Plasma Deposition, Treatment and Etching of Polymers, R. d'Agostino, ed., Plasma-Materials Interactions Series, Academic Press (1990).
H. Biederman, D. Slavinska, P. Bilkova, and V. Stundzia, in Plasma Processing of Polymers, R. d'Agostino, P. Favia, and F. Fracassi, ed., NATO ASI Series E: Appl. Science, Kluwer Acad. Publ. (1997).
R. d'Agostino, L. Martinu, and V. Pische, Plasma Chem. Plasma Proc., 11, 1, (1991).
R. d'Agostino, F. Fracassi, R. Lamendola, and F. Palumbo; High Temp. Chem. Proc., 2, 287 (1993).
E. Kay and M. Hecq, J. Appl. Phys., 55, 370 (1984).
R. Hauert, R. Gampp, U. Muller, A. Schroeder, J. Blum, J. Mayer, F. Birchler, and E. Wintermantel, Polymer Preprints, 38, 994 (1997).
13. D. L. Flamm and G. K. Herb, in Plasma Etching: An Introduction, D. Manos and D. L. Flamm, eds., Academic Press (1989).
J. L. Vossen, J. Electrochem. Soc., 126, 1308 (1978).
J. W. Coburn and M. J. Chen, Appl. Phys., 51, 3134 (1980).
R. d'Agostino, F. Cramarossa, S. De Benedictis, and G. Ferraro, J. Appl. Phys., 52, 1259, 1811.
17. R. d'Agostino, in Plasma Processing of Polymers, R. d'Agostino, P. Favia, F. Fracassi eds., NATO ASI Series E: Appl. Science, Kluwer Acad. Publ. (1997).
R. Foerch, G. Beamson, and D. Briggs, Surf. Interface Anal., 17, 842 (1991).
D. S. Everhart and C. N. Reilley, Anal. Chem., 53, 665 (1981).
R. E. Allred and W. C. Shimpf, in Plasma Surface Modification of Polymers: Relevance to Adhesion, M. Strobel, C. Lyons, and L. K. Mittal, eds., VSP (1994).
G. Beamson and D. Briggs, High Resolution XPS of Organic Polymers. The Scienta ESCA300 Database, J. Wiley (1992).
E. E. Johnston and B. D. Ratner, in Surface Modification of Polymeric Biomaterials, B. D. Ratner and D. G. Castner, eds., Plenum Press (1997).
A. Chilkoti and B. D. Ratner, Surf. Interface Anal., 17, 567 (1991).
A. Chilkoti, B. D. Ratner, and D. Briggs, Chem. Mater., 3, 51 (1991).
Unpublished results from our laboratory.
N. P. Desai and J. A. Hubbel, J. Biomed. Mater. Res., 25, 829 (1991).
M. J. Bridgett, M. C. Davies, and S. P. Denyer, Biomaterials, 13, 411 (1992).
J. Klein, J. Macromol. Chem. Macromol. Symp., 1, 125 (1986).
J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-Ray Photoelectron Spectroscopy, Perkin Elmer Corp. Publisher (1992).
C. D. Wagner and A. Joshi, J. Electr. Spectr. Rel. Phen., 47, 283 (1988).
S. D. Waddington, in Practical Surface Analysis. Vol. 1 Auger and X-Ray Photoelectron Spectroscopy; D. Briggs and M. P. Seah, eds., J. Wiley (1983).