Performances of interferometric optical transmission diagnostic for in situ and real-time control of magnetron sputtering deposition process

Macleod, 1981, Appl. Optics, 20, 82, 10.1364/AO.20.000082 Vidal, 1978, Appl. Optics, 17, 1038, 10.1364/AO.17.001038 Vidal, 1979, Appl Optics, 18, 3857, 10.1364/AO.18.003857 Perry, 1997, Surf. Coat. Technol., 94–95, 681, 10.1016/S0257-8972(97)00511-2 Born, 1970 Heavens, 1955 F. Perry, L. Lelait, P. Pigeat, A. Billard, C. Frantz, in: Proc. 12th Int. Coll. on Plasma Processes, Antibes, France, June 1999, pp. 285. Paulick, 1986, Appl. Optics, 25, 562, 10.1364/AO.25.000562 Dobrowlolski, 1983, Appl. Optics, 22, 3191, 10.1364/AO.22.003191 Beck, 1977 Ben Amor, 1997, Mater. Sci. Eng., 47, 110, 10.1016/S0921-5107(97)00027-5 Okimura, 1996, Thin Solid Films, 281–282, 427, 10.1016/0040-6090(96)08659-2 Szczyrbowsky, 1997, J. Non-Cryst. Solids, 218, 262, 10.1016/S0022-3093(97)00239-1