Performance Analysis of Sub 10 nm Double Gate Circular MOSFET

Silicon - Tập 14 - Trang 9431-9439 - 2022
Kallepelli Sagar1, Satish Maheshwaram1
1Department of Electronics & Communication Engineering, National Institute of Technology, Warangal, India

Tóm tắt

In this work, TCAD based investigation of various Circular double gate MOSFET (CDGT) architectures have been carried for Low-Power(LP) & High- Performance (HP) applications at 10 nm gate length. Among all architectures, the optimum performance of CDGT is obtained by implementing both underlap & high – k dielectric material used as a gate stack. The hafnium -based CDGT architecture with 2 nm of underlap length provides good electrical properties, with an ION/IOFF ratio of ~1.55 × 107, a near-ideal subthreshold slope of ~66 mV/dec, and a reduced drain – induced barrier lowering of ~56 mV/V.

Tài liệu tham khảo

Yoon JS, Jeong J, Lee S, Baek RH (2019) Metal source-/drain-induced performance boosting of Sub-7-nm node Nanosheet FETs. IEEE Trans Electron Devices 66:1868–1873 Vadthiya N, Tripathi S, Naik RBS (2018) A two-dimensional (2D) analytical modeling and improved Short Channel performance of Graded-Channel gate-stack (GCGS) dual-material double-gate (DMDG) MOSFET. Silicon 10:2399–2407 Sreenivasulu VB, Narendar V (2021) A comprehensive analysis of Junctionless tri-gate (TG) FinFET towards low-power and high-frequency applications at 5-nm gate length. Silicon 10:13008 Maheshwaram S, Manhas SK, Kaushal G, Anand B, Singh N (2012) Device circuit co-design issues in vertical nanowire CMOS platform. IEEE Electron Device Lett. 33:934–936 Dasgupta A, Parihar SS, Kushwaha P, Agarwal H, Kao MY, Salahuddin S, Chauhan YS, Hu C (2020) BSIM compact model of quantum confinement in advanced nanosheet FETs. IEEE Trans Electron Devices 67:730–737 Zhang X, Liu X, Yin L, Du G (2017) Impacts of diameter and Ge content variation on the performance of Si1-xGex p-channel gate-all-around nanowire transistors. 2017 Silicon Nanoelectron Work SNW 2017 17:108–111 Narendar V, Mishra RA (2015) Analytical modeling and simulation of multigate FinFET devices and the impact of high-k dielectrics on short channel effects (SCEs). Superlattice Microst 85:357–369 Chung TM, Olbrechts B, Södervall U, Bengtsson S, Flandre D, Raskin JP (2007) Planar double-gate SOI MOS devices: fabrication by wafer bonding over pre-patterned cavities and electrical characterization. Solid State Electron 51:231–238 Suddapalli SR, Nistala BR (2021) Analog/RF performance of graded channel gate stack triple material double gate strained-Si MOSFET with fixed charges. Silicon. https://doi.org/10.1007/s12633-021-01028-0 Pandey A, Raycha S, Maheshwaram S, Manhas SK, Dasgupta S, Saxena AK, Anand B (2014) Effect of load capacitance and input transition time on FinFET inverter capacitances. IEEE Trans Electron Devices 61:30–36 Kaushal G, Rathod SS, Maheshwaram S, Manhas SK, Saxena AK, Dasgupta S (2012) Radiation effects in Si-NW GAA FET and CMOS inverter: a TCAD simulation study. IEEE Trans Electron Devices 59:1563–1566 Das UK, Bhattacharyya TK (2020) Opportunities in device scaling for 3-nm node and beyond: FinFET versus GAA-FET versus UFET. IEEE Trans Electron Devices 67:2633–2638 Sreenivasulu VB, Narendar V (2021) Design and temperature assessment of junctionless nanosheet FET for nanoscale applications. Silicon. https://doi.org/10.1007/s12633-021-01145-w Lin YR, Lin YH, Chen YF, Hsu YT, Chen YH, Huang YH, Wu YC (2020) Performance of Junctionless and inversion-mode thin-film transistors with stacked Nanosheet channels. IEEE trans Nanotechnol. 19:84–88 Sallagoity P, Ada-Hanifi M, Paoli M, Haond M (1995) Analysis of parasitic effects in advanced isolation schemes for deep submicron CMOS technologies. Eur Solid-State Device Res Conf 43:375–378 Gimenez SP (2016) Layout Techniques for MOSFETs vol 2 (Synthesis Lectures on Emerging Engineering Technologies. San Rafael, CA, USA: Morgan & Claypoole Books) Williams N, Silva H, Gokirmak A (2012) Nanoscale ring FETs. IEEE Electron Device Lett 33:1339–1341 De Lima JA, Gimenez SP (2009) A novel overlapping circular-gate transistor and its application to power MOSFETs. ECS Trans 23:361–369 Gimenez SP, Ferreira RM, Martino JA (2007) Early voltage behavior in circular gate SOI nMOSFET using 0.13um partially-depleted SOI CMOS technology. ECS Trans 4:309–318 De Lima JA, Gimenez SP, Cirne KH (2012) Modeling and characterization of overlapping circular-gate mosfet and its application to power devices. IEEE Trans Power Electron 27:1622–1631 De Lima JA, Silveira MAG, Cirne KH, Santos RBB, Medina NH (2011) X-ray radiation effects in overlapping circular-gate MOSFET’s. Proc Eur. Conf. Radiat. its Eff. Components Syst. RADECS 88–91 Williams NE, Gokirmak A (2011) hydrodynamic simulations of a nanoscale RingFET. 2011 Int Semicond Device Res Symp ISDRS 2011 91:9–10 Kumar S, Kumari V, Singh S, Saxena M, Gupta M (2015) Nanoscale-RingFET: an analytical drain current model including SCEs. IEEE Trans Electron Devices 62:3965–3972 Kumari V, Saxena M, Gupta M (2018) RingFET Architecture for High Frequency Applications: TCAD based Assessment. Proc. Int. Conf. 2018 IEEE Electron Device Kolkata Conf. EDKCON 423–427 Kallepelli S, Maheshwaram S (2021) A novel circular double gate with raised source/drain SOI MOSFET. Semicond Sci Technol 36:65009 Genius, 3-D Device Simulator (2008) Version 1.9.3, reference manual 2008–2019. Cogenda Pte Ltd, Singapore Ming L, Kyoung HY, Sung DS, Yun YY, Kim DW, Tae YC, Kyung SO, Lee WS (2009) Sub-10 nm gate-all-around CMOS nanowire transistors on bulk Si substrate dig. Tech Pap - Symp VLSI Technol 94–95 IRDS (2016) International Roadmap for Devices and Systems (2017) Edition More Moore. IEEE Adv Technol Humanit 1–36 Shobana VM, Srinivasan R, Vaithianathan V, Nagarajan KK (2017) Performance optimization of RingFET using LDD implantation Int. Conf. Nextgen Electron. Technol. Silicon to Software, ICNETS 180–183 Gupta R, Vaid R (2016) TCAD performance analysis of high-K dielectrics for gate all around InAs nanowire transistor considering scaling of gate dielectric thickness. Microelectron Eng 160:22–26 Chandra ST, Balamurugan NB (2014) Performance analysis of silicon nanowire transistors considering effective oxide thickness of high-k gate dielectric. J Semicond 35:0440012