Oxynitride perovskite LaTiOxNy thin films deposited by reactive sputtering

Progress in Solid State Chemistry - Tập 35 - Trang 299-308 - 2007
C. Le Paven-Thivet1, L. Le Gendre1, J. Le Castrec1, F. Cheviré2, F. Tessier2, J. Pinel1
1Equipe “Technologie Couches Minces”, I.U.T. de Saint-Brieuc, I.E.T.R., UMR CNRS 6164, Université de Rennes 1, 18 rue H. Wallon, BP 406, 22004 Saint-Brieuc Cedex 1, France
2UMR CNRS 6512 “Verres et Céramiques”, Institut de Chimie de Rennes, Université de Rennes 1, 35042 Rennes Cedex, France

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