Outgassing performance of an ionic liquid-based magnetic fluid

Vacuum - Tập 164 - Trang 34-40 - 2019
Takao Okabe1, Yukishige Kondo2, Shigeka Yoshimoto3, Shinya Sasaki3
1Department of Applied Electronics, Tokyo University of Science, 6-3-1Niijuku Katsushika-ku, Tokyo, 125-8585, Japan
2Department of Industrial Chemistry, Tokyo University of Science, 1-3 Shinjyuku-ku Kagurazaka, Tokyo, 162-8601, Japan
3Department of Mechanical Engineering, Tokyo University of Science, 6-3-1 Niijuku, Katsushika-ku, Tokyo, 125-8585, Japan

Tóm tắt

Từ khóa


Tài liệu tham khảo

Rosensweig R. E. Magnetic Fluid Seals 1971: US Patent No. 3,620,584.

Rosensweig, 1987, Magnetic fluids, Annu. Rev. Fluid Mech., 19, 437, 10.1146/annurev.fl.19.010187.002253

Ogata, 1994, Electron-beam writing system and its application to large and high-density diffractive optic elements, Appl. Opt., 33, 2032, 10.1364/AO.33.002032

Wada, 2001, High-density recording using an electron beam recorder, Jpn. J. Appl. Phys., 40, 1653, 10.1143/JJAP.40.1653

Furuki, 2003, Electron beam recording with a novel differential pumping head realizing more than 50 GB/Layer capacity disc, Jpn. J. Appl. Phys., 42, 759, 10.1143/JJAP.42.759

Wada, 2008, Improvement of electron beam recorder for mastering of future storage media, Jpn. J. Appl. Phys., 47, 6007, 10.1143/JJAP.47.6007

Kitahara, 2010, Electron beam recorder for patterned media mastering, Jpn. J. Appl. Phys., 49, 10.1143/JJAP.49.06GE02

Watanabe, 2016, Nanohole and dot patterning processes on quartz substrate by R–θ electron beam lithography and nanoimprinting, Jpn. J. Appl. Phys., 55, 10.7567/JJAP.55.06GM03

Gwyn, 1998, Extreme ultraviolet lithography, J. Vac. Sci. Technol., 16, 3142, 10.1116/1.590453

Solak, 1999, Nanolithography using extreme ultraviolet lithography interferometry: 19 nm lines and spaces, J. Vac. Sci. Technol., 17, 3052, 10.1116/1.590953

Desai, 2017, Process development for high resolution hydrogen silsesquioxane patterning using a commercial scanner for extreme ultraviolet lithography, J. Vac. Sci. Technol., 35, 021603-1

Vekas, 2004, Magnetic nanofluids properties and some applications, Rom. J. Phys., 49, 707

Kanno, 1997, Preparation of magnetic fluid having active-gas resistance and ultra-low vapor pressure for magnetic fluid vacuum seals, Tribol. Int., 30, 701, 10.1016/S0301-679X(97)00060-1

Kojima, 1998, High density mastering using electron beam, Jpn. J. Appl. Phys., 37, 2137, 10.1143/JJAP.37.2137

Liu, 2002, Tribological performance of room-temperature ionic liquids as lubricant, Journal of Tribology Letters, 13, 81, 10.1023/A:1020148514877

Suzuki, 2007, Tribological characteristics of imidazolium-based room temperature ionic liquids under high vacuum, Tribol. Lett., 27, 307, 10.1007/s11249-007-9235-8

Zhang, 2013, Vacuum tribological performance of phosphonium-based ionic liquids as lubricants and lubricant additives of multi-alkylated cyclopentanes, Journal of Tribology International, 66, 289, 10.1016/j.triboint.2013.06.012

Barnhill, 2014, Phosphonium-organophosphate ionic liquids as lubricant additives: effects of cation structure on physicochemical and tribological characteristics, ACS Appl. Mater. Interfaces, 6, 22585, 10.1021/am506702u

Pejaković, 2014, Influence of temperature on tribological behaviour of ionic liquids as lubricants and lubricant additives, Lubric. Sci., 26, 107, 10.1002/ls.1233

Kobayashi, 2015, Lubrication performance of ionic liquids as lubricants for space mechanisms under high vacuum and low temperature, Journal of Tribology Online, 10, 138, 10.2474/trol.10.138

González, 2016, Effectiveness of phosphonium cation-based ionic liquids as lubricant additive, Journal of Tribology International, 98, 82, 10.1016/j.triboint.2016.02.016

Yang, 2018, Ionic liquid additives for mixed and elastohydrodynamic lubrication, Journal of Tribology Transactions, 61, 816, 10.1080/10402004.2018.1426802

Yagi, 2009, Lubricity and chemical reactivity of ionic liquid used for sliding metals under high-vacuum conditions, Journal of Engineering Tribology, 223, 1083

Okabe, 2015, Development of a vacuum-compatible hydrodynamic spindle using an ionic liquid as a lubricant, Precis. Eng., 40, 124, 10.1016/j.precisioneng.2014.10.013

Okabe, 2015, Electron beam mastering system using a vacuum-compatible hydrodynamic spindle, Journal of Microelectronic Engineering, 142, 64, 10.1016/j.mee.2015.07.014

Oliveira, 2009, Magnetic fluids based on γ-Fe2O3 and CoFe2O4 nanoparticles dispersed in ionic liquids, J. Phys. Chem. C, 113, 8566, 10.1021/jp810501m

Rodríguez-Arco, 2011, Steric repulsion as a way to achieve the required stability for the preparation of ionic liquid-based ferrofluids, J. Colloid Interface Sci., 357, 252, 10.1016/j.jcis.2011.01.083

Medeiros, 2012, Magnetic Ionic Liquids produced by the dispersion of magnetic nanoparticles in 1-n-butyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide(BMI.NTf2), Applied Materials & Interfaces, 4, 5458, 10.1021/am301367d

Shi, 2018, Ionic liquids–based magnetic nanofluids as lubricants, Lubric. Sci., 30, 73, 10.1002/ls.1405

Rodríguez-Arco, 2011, Stability and magnetorheological behaviour of magnetic fluids based on ionic liquids, J. Phys. Condens. Matter, 23, 455101, 10.1088/0953-8984/23/45/455101

Jain, 2011, Stable and water-tolerant ionic liquid ferrofluids, ACS Appl. Mater. Interfaces, 3, 662, 10.1021/am1012112

Mamusa, 2015, Concentrated assemblies of magnetic nanoparticles in ionic liquids, Faraday Discuss, 181, 193, 10.1039/C5FD00019J

Huang, 2016, Ferrofluids lubrication: a status report, Lubric. Sci., 28, 3, 10.1002/ls.1291

Okabe, 2017, Development and performance of a magnetic ionic liquid for use in vacuum-compatible non-contact seals, Journal of Precision Engineering, 47, 97, 10.1016/j.precisioneng.2016.07.010