On the sensitivity improvement of CMOS capacitive accelerometer

S.J. Sherman, Monolithic accelerometer, U.S.A. Patent No. 5345824S, Analog Devices, Inc. September 13, 1994. L.R. Carley, M.L. Reed, G.K. Fedder, Microelectromechanical structure and process of making same, U.S.A. Patent No. 5,717,631. Carnegie Mellon University, February 10, 1998. Luo, 2002, A post-CMOS micromachined lateral accelerometer, IEEE/ASME J. MEMS, 11, 188, 10.1109/JMEMS.2002.1007397 Tsai, 2005, Mechanical noise-limited CMOS-MEMS accelerometers, 630 Xie, 2003, Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer, 292 Lakdawala, 2004, Temperature stabilization of CMOS capacitive accelerometer, IEEE/ASME J. MEMS, 13, 559 Klaus, 2002, Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications, Sens. Actuators A, 97/98, 83, 10.1016/S0924-4247(01)00799-3 Socher, 1998, Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors, Sens. Actuators A, 71, 107, 10.1016/S0924-4247(98)00179-4 Luo, 2002, A copper CMOS-MEMS Z-axis gyroscope, 631 Xie, 2003, Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope, IEEE Sens. J., 622 Graf, 2005, 3D nonlinear modeling of microhotplates in CMOS technology for use as metal-oxide-based gas sensors, J. Micromech. Microeng., 15, 190, 10.1088/0960-1317/15/1/027 Seidel, 1995, A piezoresistive silicon accelerometer with monolithically integrated CMOS-circuitry, 597 Dauderstadt, 1997, Temperature dependence and drift of a thermal accelerometer, 1209 Degani, 1998, Micromachined accelerometer with modulated integrative differential optical sensing, Electron. Lett., 34, 654, 10.1049/el:19980484