On the evaluation of damping in MEMS in the slip-flow regime

International Journal for Numerical Methods in Engineering - Tập 68 Số 10 - Trang 1031-1051 - 2006
Alejandro F. Frangi1, G. Spinola2, Benedetto Vigna2
1Department of Structural Engineering, Politecnico of Milano, P.za Leonardo da Vinci 32, 20133 Milan, Italy
2MEMS Business Unit, STMicroelectronics, Cornaredo (Milan), Italy

Tóm tắt

Từ khóa


Tài liệu tham khảo

Karniadakis, 2002, Micro Flows, Fundamentals and Simulation, 10.1115/1.1483361

Park, 2004, Rarefaction effects on shear driven oscillatory gas flows: a direct simulation Monte Carlo study in the entire Knudsen regime, Physics of Fluids, 16, 317, 10.1063/1.1634563

Frangi, 2005, Multipole BEM for the evaluation of damping forces on MEMS, Computational Mechanics, 37, 24, 10.1007/s00466-005-0694-1

Power, 1995, Boundary Integral Methods in Fluid Mechanics

Frangi, 2005, A qualocation enhanced approach for the Dirichlet problem of exterior Stokes flow, Engineering Analysis with Boundary Elements, 29, 886, 10.1016/j.enganabound.2005.04.011

Frangi, 2005, A fast multipole implementation of the qualocation mixed-velocity-traction approach for exterior Stokes flows, Engineering Analysis with Boundary Elements, 29, 1039, 10.1016/j.enganabound.2005.05.010

Bailey CL Barber RW Emerson DR Is it safe to use Navier-Stokes for gas microflows? 2004

Yuhong, 2006, Inverted velocity profiles in rarefied cylindrical Couette gas flow and the impact of the accommodation coefficient, Physics of Fluids, 17

Ding, 2004, A fast integral approach for drag force calculations to oscillatory slip Stokes flows, International Journal for Numerical Methods in Engineering, 60, 1535, 10.1002/nme.1013

Aluru NR White J A fast integral equation technique for analysis of microflow sensors based on drag force calculations 1998 283 286

Ye, 2003, Air damping in lateral oscillating micro-resonators: a numerical and experimental study, Journal of MEMS, 12, 557, 10.1109/JMEMS.2003.817895

Mukherjee, 2005, BEM modeling of damping forces on MEMS with thin plates, Engineering Analysis with Boundary Elements, 29, 1000, 10.1016/j.enganabound.2005.05.012

Bonnet, 1999, Boundary Integral Equation Methods for Solids and Fluids

Frangi, 2002, 3D fracture analysis by the symmetric Galerkin BEM, Computational Mechanics, 28, 220, 10.1007/s00466-001-0283-x

Tausch, 1998, Second kind integral formulations of the capacitance problem, Advances in Computational Mathematics, 9, 217, 10.1023/A:1018973019922

Guiggiani, 1994, Hypersingular formulation for boundary stress evaluation, Engineering Analysis with Boundary Elements, 55, 169, 10.1016/0955-7997(94)90019-1

1998, Singular Integrals in Boundary Element Methods, Advances in Boundary Elements

Milroy, 1997, The elastostatic three dimensional boundary element method: analytical integration for linear isoparametric triangular elements, Applied Mathematical Modelling, 21, 763, 10.1016/S0307-904X(97)00098-X

Nishimura, 2002, Fast multipole accelerated boundary integral equation methods, Applied Mechanical Reviews, 55, 299, 10.1115/1.1482087

Greengard, 1997, A new version of the fast multipole algorithm for the Laplace equation in three dimensions, Acta Numerica, 6, 229, 10.1017/S0962492900002725

Nishimura, 2001, Application of fast multipole Galerkin boundary integral equation method to elastostatic crack problems in 3D, International Journal for Numerical Methods in Engineering, 50, 525, 10.1002/1097-0207(20010130)50:3<525::AID-NME34>3.0.CO;2-4

Epton, 1995, Multipole translation theory for the three-dimensional Laplace and Helmholtz equations, SIAM Journal on Scientific Computing, 16, 865, 10.1137/0916051

Frayssé V Giraud L Gratton S Langou J A set of GMRES routines for real and complex arithmetics on high performance computers 2003