Non-Contact and In-Process Measurement of Film Coating Thickness by Combining Two Principles of Eddy-Current and Capacitance Sensing

Giulio, 1998, Performances of a Fiber Optic Sensor for on Line Measurement of Coating Thickness, SPIE Process. Mon. Appl. of Fiber Opitc Sensors, 3538, 174 Tojo, 2004, Highly Accurate Measurement of Sheet Thickness: The Planar Error Correction, IEEE Trans. on Appl. Superconductivity, 14, 1810, 10.1109/TASC.2004.830868 Arikan, 2001, Process Simulation and Paint Thickness Measurement for Robot Spray Painting, Annals of the CIRP, 50, 291, 10.1016/S0007-8506(07)62124-6 Chen, 1998, Design and Implementation of Capacitive Proximity Sensor Using Microelectromechanical Systems Technology, IEEE Trans. Indus. Elec., 45, 886, 10.1109/41.735332 Toth, 1996, A Low-Cost Stable Reference Capacitor for Capacitive Sensor Systems, IEEE Trans. Instrum. Meas., 45, 526, 10.1109/19.492780 Kim, 2007, Modeling of Eddy Current Sensor Using Geometric and Electromagnetic Data, J. Mech. Sci. Tech., Dynamic and Control Meas, 21, 488