Nanoimprint lithography for optic fluidics with phase gratings for environmental monitoring application

Microelectronic Engineering - Tập 87 - Trang 824-826 - 2010
Rong Yang1, Bing-Rui Lu1,2, Jing Xue1, Zhen-Kui Shen1, Zhen-Cheng Xu1, Ejaz Huq2, Xin-Ping Qu1, Yifang Chen2, Ran Liu1
1State Key Lab of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, China
2Micro and Nanotechnology Centre Rutherford Appleton Laboratory, STFC, Didcot, Oxon, OX11 0QX, UK

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