Nanocomposite Thin Films of Transition Metal Carbides Fabricated Using Pulsed Laser Deposition
Tóm tắt
A study has been conducted on the pulsed laser deposition (PLD) of transition metal carbides in order to examine alloying and phase formation in binary systems. Alternating layers of TiC/ZrC and ZrC/VC were deposited at 400 C and 5 mTorr Ar with nominal period thicknesses of 0.6 nm, 10.0 nm, and 50.0 nm. ZrC/VC x-ray diffraction analysis showed that the alloys were amorphous and the TiC/ZrC alloys were crystalline. The thicker films showed a higher degree of phase separation of the two compounds. Transmission electron microscopy confirmed the amorphous structure in the 0.6 nm ZrC/VC film, while the 50.0 nm film showed a layered structure and extremely fine grain size.
Tài liệu tham khảo
Toth, E. Louis “Transition Metal Carbides and Nitrides”, Academic Press, New York (1971).
Pulsed Laser Deposition of Thin Films, D.B. Chrisey and G.H. Hubler, eds. Wiley & Sons, 1994.
O. Knotek and A. Barimani, Thin Solid Films, v. 174, pp. 51–56 (1989).
W. B. Pearson, A Handbook of Lattice Spacings and Structures of Metals and Alloys, Pergamon Press, New York (1958).
Smithells Metals Reference Book, Eric A. Brandes, Ed., pp. 13–23, Buttersworth, London (1983).
Pulsed Laser Deposition, D. Chrisey & G. Hubler, eds., Wiley 1994.