Nano- and microstructuring of solids by swift heavy ions

Physics-Uspekhi - Tập 60 Số 5 - Trang 435-471 - 2017
Ф. Ф. Комаров

Tóm tắt

Abstract

We review the current stage of research of track formation processes and mechanisms in materials irradiated by swift ions. We show that the nature and morphology of tracks depend on the type and structure of the material and on the energy density transfer to its electron subsystem. Swift heavy ions serve as tools to synthesize nanoclusters and nanowires, to controllably change their morphology, and to tailor electronic, magnetic, and optical properties. The unique optical, photoelectric, and conducting properties of tracks can be used to create a new generation of electronic and optoelectronic nanosize devices. These low-dimensional objects exhibit quantum behavior and are stimulating a broad range of fundamental and applied research.

Từ khóa


Tài liệu tham khảo

Komarov, 2003, Phys. Usp., 46, 1253, 10.1070/PU2003v046n12ABEH001286

2003, Usp. Fiz. Nauk, 173, 1287, 10.3367/UFNr.0173.200312b.1287

Silk, 1959, Philos. Mag., 4, 970, 10.1080/14786435908238273

Fleischer, 1975

Apel, 2004

Ozin, 1992, Adv. Mater., 4, 612, 10.1002/adma.19920041003

Chakarvarti, 1998, Radiat. Meas., 29, 149, 10.1016/S1350-4487(98)00009-2

Wang, 2005, Opt. Express, 13, 1486, 10.1364/OPEX.13.001486

Schulz, 2007, Opt. Express, 15, 10.1364/OE.15.013108

Vieillard, 2008, Microelectron. Eng., 85, 465, 10.1016/j.mee.2007.08.005

Jayalakshmi, 2013, Vacuum, 95, 66, 10.1016/j.vacuum.2013.02.014

Kumar, 2012, Mater. Sci. Eng. B, 177, 1476, 10.1016/j.mseb.2012.01.017

Abhirami, 2013, Vacuum, 90, 39, 10.1016/j.vacuum.2012.09.013

D’Orléans, 2003, Phys. Rev. B, 67, 10.1103/PhysRevB.67.220101

Singh, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 936, 10.1016/j.nimb.2009.02.026

Avasthi, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 3027, 10.1016/j.nimb.2010.05.033

Singh, 2012, Nucl. Instrum. Meth. Phys. Res. B, 276, 51, 10.1016/j.nimb.2012.01.034

Kachurin, 2012, Nucl. Instrum. Meth. Phys. Res. B, 282, 68, 10.1016/j.nimb.2011.08.053

Kumakhov, 1981

Miterev, 2002, Phys. Usp., 45, 1019, 10.1070/PU2002v045n10ABEH001201

2002, Usp. Fiz. Nauk, 172, 1131, 10.3367/UFNr.0172.200210b.1131

Fain, 1974, Radiat. Res., 57, 379, 10.2307/3573885

Chatterjee, 1976, Rad. Environ. Biophys., 13, 215, 10.1007/BF01330766

Akkerman, 2005, Nucl. Instrum. Meth. Phys. Res. B, 227, 319, 10.1016/j.nimb.2004.08.020

Kalinichenko, 2013

Kaplan, 1985, Dokl. Akad. Nauk SSSR, 280, 127

Magee, 1980, J. Phys. Chem., 84, 3529, 10.1021/j100463a008

Mozumder, 1974, J. Chem. Phys., 60, 1145, 10.1063/1.1681125

Waligorski, 1986, Nucl. Tracks Radiat. Meas., 11, 309, 10.1016/1359-0189(86)90057-9

Lee, 1999, Nucl. Instrum. Meth. Phys. Res. B, 151, 29, 10.1016/S0168-583X(99)00129-9

Miterev, 1997, High Energy Chem., 31, 173

1997, Khim. Vysok. Energ., 31, 197

Bethe, 1930, Ann. Physik, 5, 325, 10.1002/andp.19303970303

Bethe, 1950, Rev. Mod. Phys., 22, 213, 10.1103/RevModPhys.22.213

Bloch, 1933, Ann. Physik, 16, 285, 10.1002/andp.19334080303

Barkas, 1963, 1

Schiwietz, 2001, Nucl. Instrum. Meth. Phys. Res. B, 175–177, 125, 10.1016/S0168-583X(00)00583-8

Akkerman, 2011, Nucl. Instrum. Meth. Phys. Res. B, 269, 1630, 10.1016/j.nimb.2010.11.033

Ziegler, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 1818, 10.1016/j.nimb.2010.02.091

Sigmund, 2005, Errata and addenda for ICRU Report 73, Stopping of ions heavier than Helium, J. ICRU, 5

Grande, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 859, 10.1016/j.nimb.2009.02.017

2011

Bradt, 1948, Phys. Rev., 74, 1828, 10.1103/PhysRev.74.1828

Gryziñski, 1965, Phys. Rev., 138, A322, 10.1103/PhysRev.138.A322

Garcia, 1969, Phys. Rev., 177, 223, 10.1103/PhysRev.177.223

Kaganovich, 2006, New J. Phys., 8, 278, 10.1088/1367-2630/8/11/278

Khandelwal, 1969, Atom. Data, 1, 103, 10.1016/S0092-640X(69)80022-7

Choi, 1973, Atom. Data, 5, 291, 10.1016/S0092-640X(73)80010-5

Ritchie, 1959, Phys. Rev., 114, 644, 10.1103/PhysRev.114.644

Tung, 1976

Akkerman, 1996, Phys. Status Solidi B, 198, 769, 10.1002/pssb.2221980222

Slater, 1930, Phys. Rev., 36, 57, 10.1103/PhysRev.36.57

Khandelwal, 1966, Phys. Rev., 151, 12, 10.1103/PhysRev.151.12

Colladant, 2006, Nucl. Instrum. Meth. Phys. Res. B, 245, 464, 10.1016/j.nimb.2005.11.144

Kaliman, 2001, Phys. Rev. A, 65, 10.1103/PhysRevA.65.012708

Baranov, 2012, Nucl. Instrum. Meth. Phys. Res. B, 286, 51, 10.1016/j.nimb.2012.01.011

Kuhr, 1999, Electron Spectrosc. Relat. Phenom., 105, 257, 10.1016/S0368-2048(99)00082-1

Rymzhanov, 2016, Nucl. Instrum. Meth. Phys. Res. B, 388, 41, 10.1016/j.nimb.2016.11.002

Pines, 1963

Rymzhanov, 2014, Nucl. Instrum. Meth. Phys. Res. B, 326, 238, 10.1016/j.nimb.2013.10.035

Rymzhanov, 2015, Nucl. Instrum. Meth. Phys. Res. B, 354, 292, 10.1016/j.nimb.2014.11.032

Van Hove, 1954, Phys. Rev., 95, 249, 10.1103/PhysRev.95.249

Leibfried, 1965

Akkerman, 2014, Nucl. Instrum. Meth. Phys. Res. B, 321, 1, 10.1016/j.nimb.2013.12.002

Brandt, 1982, Phys. Rev. B, 25, 5631, 10.1103/PhysRevB.25.5631

Sigmund, 2016, Nucl. Instrum. Meth. Phys. Res. B, 382, 15, 10.1016/j.nimb.2015.12.041

Ritchie, 1982, Nucl. Instrum. Meth. Phys. Res., 198, 133, 10.1016/0167-5087(82)90064-3

Klaumünzer, 2005, Matematisk-Fysiske Meddelelser, 52, 293

Insepov, 2008, Phys. Rev. A, 77, 10.1103/PhysRevA.77.062901

Johnson, 1982, Nucl. Instrum. Meth. Phys. Res., 198, 103, 10.1016/0167-5087(82)90059-X

Leseur, 1993, Radiat. Eff. Def. Solids, 126, 163, 10.1080/10420159308219701

Schiwietz, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 4, 10.1016/S0168-583X(04)00780-3

Xiao, 1997, Phys. Rev. Lett., 79, 1821, 10.1103/PhysRevLett.79.1821

Schiwietz, 2001, Nucl. Instrum. Meth. Phys. Res. B, 175–177, 1, 10.1016/S0168-583X(00)00544-9

Sakata, 2011, Nucl. Instrum. Meth. Phys. Res. B, 269, 795, 10.1016/j.nimb.2010.12.019

Schiwietz, 1992, Phys. Rev. Lett., 69, 628, 10.1103/PhysRevLett.69.628

Schiwietz, 1999, Europhys. Lett., 47, 384, 10.1209/epl/i1999-00400-0

Schiwietz, 2002, Nucl. Instrum. Meth. Phys. Res. B, 193, 705, 10.1016/S0168-583X(02)00891-1

Schiwietz, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 1287, 10.1016/j.nimb.2007.11.048

Schiwietz, 2013, Nucl. Instrum. Meth. Phys. Res. B, 317, 48, 10.1016/j.nimb.2012.12.099

Onsager, 1938, Phys. Rev., 54, 554, 10.1103/PhysRev.54.554

Lifshitz, 1981

1979

Hänsch, 1986, J. Appl. Phys., 60, 650, 10.1063/1.337408

Roldan, 1996, J. Appl. Phys., 80, 5121, 10.1063/1.363493

Grasser, 2003, Proc. IEEE, 91, 251, 10.1109/JPROC.2002.808150

Bordelon, 1991, Solid-State Electron., 34, 617, 10.1016/0038-1101(91)90136-M

Mizuno, 1993, J. Appl. Phys., 74, 1100, 10.1063/1.354959

Hughes, 1973, Phys. Rev. Lett., 30, 1333, 10.1103/PhysRevLett.30.1333

Hughes, 1975, Phys. Rev. Lett., 35, 449, 10.1103/PhysRevLett.35.449

Ramazashvili, 1963, Sov. Phys. JETP, 16, 939

1963, Sov. Phys. JETP, 43, 1323

Garin, 1988, Khim. Vys. Energ., 22, 195

Lankin, 2009, Phys. Rev. E, 79, 10.1103/PhysRevE.79.036407

Komarov, 1987, Izv. Akad. Nauk Belorussk. SSR, 81

Rethfeld, 2002, Phys. Rev. B, 65, 10.1103/PhysRevB.65.214303

Osmani, 2011, Phys. Rev. B, 84, 10.1103/PhysRevB.84.214105

Gorbunov, 2013, Nucl. Instrum. Meth. Phys. Res. B, 315, 173, 10.1016/j.nimb.2013.04.082

Kaiser, 2000, Phys. Rev. B, 61, 10.1103/PhysRevB.61.11437

Landau, 1987

1986

Epifanov, 1979

1977

Vedenov, 1985

Medvedev, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 3160, 10.1016/j.nimb.2010.05.078

Terekhin, 2015, Nucl. Instrum. Meth. Phys. Res. B, 354, 200, 10.1016/j.nimb.2015.01.069

Medvedev, 2008, AIP Conf. Proc., 999, 238, 10.1063/1.2918110

Guizard, 1996, Nucl. Instrum. Meth. Phys. Res. B, 116, 43, 10.1016/0168-583X(96)00008-0

Guizard, 1996, J. Phys. Condens. Matter, 8, 1281, 10.1088/0953-8984/8/9/018

Seidl, 2001, Nucl. Instrum. Meth. Phys. Res. B, 183, 502, 10.1016/S0168-583X(01)00770-4

Novichenok, 1971

Baranov, 1988, Sov. Phys. Usp., 31, 1015, 10.1070/PU1988v031n11ABEH005646

1988, Usp. Fiz. Nauk, 156, 477, 10.3367/UFNr.0156.198811c.0477

Kitayama, 2015, Nucl. Instrum. Meth. Phys. Res. B, 354, 183, 10.1016/j.nimb.2014.11.002

Komarov, 2015, Nucl. Instrum. Meth. Phys. Res. B, 360, 150, 10.1016/j.nimb.2015.08.064

Kamarou, 2008, Phys. Rev. B, 78, 10.1103/PhysRevB.78.054111

Kalinichenko, 2008, Voprosy Atom. Nauki Tekh. Ser. Fiz. Radiats. Povrezhdenii Radiats. Materialoved., 92, 131

Tombrello, 1995, Nucl. Instrum. Meth. Phys. Res. B, 95, 232, 10.1016/0168-583X(94)00425-0

Stampfli, 1996, Nucl. Instrum. Meth. Phys. Res. B, 107, 138, 10.1016/0168-583X(96)80046-2

Bullough, 1966, J. Appl. Phys., 37, 2283, 10.1063/1.1708804

Klaumünzer, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 136, 10.1016/j.nimb.2004.05.014

Surwase, 2016, Nucl. Instrum. Meth. Phys. Res. B, 387, 1, 10.1016/j.nimb.2016.09.013

Young, 2006, Nucl. Instrum. Meth. Phys. Res. B, 252, 175, 10.1016/j.nimb.2006.05.032

Pakarinen, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 3163, 10.1016/j.nimb.2010.05.079

Leino, 2014, Nucl. Instrum. Meth. Phys. Res. B, 326, 289, 10.1016/j.nimb.2013.10.075

Gol’danskii, 1975, JETP Lett., 21, 166

1975, Pis’ma Zh. Eksp. Teor. Fiz., 21, 365

Schwartz, 2006, Nucl. Instrum. Meth. Phys. Res. B, 245, 204, 10.1016/j.nimb.2005.11.102

Ronchi, 1973, J. Appl. Phys., 44, 3575, 10.1063/1.1662802

Davydov, 1986, 60

Tombrello, 1994, Nucl. Instrum. Meth. Phys. Res. B, 94, 424, 10.1016/0168-583X(94)95418-6

Lifshits, 1959, Atom. Energ., 6, 391

Gervais, 1994, Nucl. Instrum. Meth. Phys. Res. B, 88, 355, 10.1016/0168-583X(94)95384-8

Toulemonde, 2006, Matematisk-fysiske Meddeleleser, 52, 263

Lifshits, 1960, J. Nucl. Energy A, 12, 69

Allen, 1987, Phys. Rev. Lett., 59, 1460, 10.1103/PhysRevLett.59.1460

Toulemonde, 2000, Nucl. Instrum. Meth. Phys. Res. B, 166–167, 903, 10.1016/S0168-583X(99)00799-5

Lang, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 2951, 10.1016/j.nimb.2010.05.016

Moll, 2011, Phys. Rev. B, 84, 10.1103/PhysRevB.84.064115

Dawi, 2011, Nanotechnology, 22, 10.1088/0957-4484/22/21/215607

Meftah, 2005, Nucl. Instrum. Meth. Phys. Res. B, 237, 563, 10.1016/j.nimb.2005.02.025

Toulemonde, 1996, Nucl. Instrum. Meth. Phys. Res. B, 115, 37, 10.1016/0168-583X(96)00007-9

Sall, 2015, J. Mater. Sci., 50, 5214, 10.1007/s10853-015-9069-y

Lou, 2003, Phys. Rev. B, 68, 10.1103/PhysRevB.68.134206

Osmani, 2011, Nucl. Instrum. Meth. Phys. Res. B, 282, 43, 10.1016/j.nimb.2011.08.036

Rothard, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 27, 10.1016/j.nimb.2004.05.034

Matsuzaki, 2017, Nucl. Instrum. Meth. Phys. Res. B

Baranov, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 1993, 10.1016/j.nimb.2008.03.094

Anders, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 2503, 10.1016/j.nimb.2009.05.010

Kluth, 2008, Phys. Rev. Lett., 101, 10.1103/PhysRevLett.101.175503

Itoh, 2009, J. Phys. Condens. Matter, 21, 10.1088/0953-8984/21/47/474205

Marks, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 2665, 10.1016/j.nimb.2008.03.098

Kamarou, 2006, Phys. Rev. B, 73, 10.1103/PhysRevB.73.184107

Chettah, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 2719, 10.1016/j.nimb.2009.05.063

Daraszewicz, 2011, Nucl. Instrum. Meth. Phys. Res. B, 269, 1646, 10.1016/j.nimb.2010.11.031

Dunlop, 1998, Nucl. Instrum. Meth. Phys. Res. B, 146, 302, 10.1016/S0168-583X(98)00509-6

Canut, 1998, Nucl. Instrum. Meth. Phys. Res. B, 146, 296, 10.1016/S0168-583X(98)00512-6

Daraszewicz, 2013, Nucl. Instrum. Meth. Phys. Res. B, 303, 112, 10.1016/j.nimb.2012.11.027

Jakas, 2002, Phys. Rev. B, 65, 10.1103/PhysRevB.65.165425

Gan, 2012, Comput. Phys. Commun., 183, 278, 10.1016/j.cpc.2011.10.002

Gan, 2011, Appl. Phys. A, 105, 427, 10.1007/s00339-011-6573-z

Caro, 1989, Phys. Rev. A, 40, 2287, 10.1103/PhysRevA.40.2287

Duffy, 2007, J. Phys. Condens. Matter, 19, 10.1088/0953-8984/19/1/016207

Rutherford, 2007, J. Phys. Condens. Matter, 19, 10.1088/0953-8984/19/49/496201

Colder, 2001, Nucl. Instrum. Meth. Phys. Res. B, 174, 491, 10.1016/S0168-583X(01)00314-7

Medvedev, 2010, Phys. Rev. B, 82, 10.1103/PhysRevB.82.125425

Medvedev, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 2870, 10.1016/j.nimb.2010.03.021

Komarov, 2003, Vacuum, 70, 75, 10.1016/S0042-207X(02)00620-6

Herre, 1998, Phys. Rev. B, 58, 4832, 10.1103/PhysRevB.58.4832

Gaiduk, 2000, Phys. Rev. B, 61, 10.1103/PhysRevB.61.15785

Komarov, 1999, Nucl. Instrum. Meth. Phys. Res. B, 148, 159, 10.1016/S0168-583X(98)00828-3

Komarov, 2002, JETP, 95, 316, 10.1134/1.1506440

2002, Zh. Eksp. Teor. Fiz., 122, 366

Gaiduk, 2002, Phys. Rev. B, 66, 10.1103/PhysRevB.66.045316

Gaiduk, 2005, Vacuum, 78, 375, 10.1016/j.vacuum.2005.01.052

Colder, 2002, J. Appl. Phys., 91, 5852, 10.1063/1.1467962

Komarov, 2005, Vacuum, 78, 353, 10.1016/j.vacuum.2005.01.110

Komarov, 2003, Tech. Phys., 48, 717, 10.1134/1.1583824

2003, Zh. Tekh. Fiz., 73, 56

1982, 17a, 642

Jordan, 1985, J. Cryst. Growth, 71, 551, 10.1016/0022-0248(85)90361-6

Gantmakher, 1987, 352

Volkov, 2002, Nucl. Instrum. Meth. Phys. Res. B, 193, 381, 10.1016/S0168-583X(02)00809-1

Komarov, 2004, Dokl. Nats. Akad. Nauk Belarusi, 48, 64

Szenes, 2011, Nucl. Instrum. Meth. Phys. Res. B, 296, 174, 10.1016/j.nimb.2010.11.009

Szenes, 2012, Nucl. Instrum. Meth. Phys. Res. B, 280, 88, 10.1016/j.nimb.2012.03.012

Itoh, 1998, Nucl. Instrum. Meth. Phys. Res. B, 146, 362, 10.1016/S0168-583X(98)00448-0

Yavlinskii, 2000, Nucl. Instrum. Meth. Phys. Res. B, 166–167, 35, 10.1016/S0168-583X(99)00736-3

Osmani, 2013, Nucl. Instrum. Meth. Phys. Res. B, 317, 72, 10.1016/j.nimb.2012.12.092

Hillyard, 2007, Phys. Rev. Lett., 98, 10.1103/PhysRevLett.98.125501

Wang, 2013, J. Phys. Condens. Matter, 25

Lushchik, 2013, Phys. Status Solidi B, 250, 261, 10.1002/pssb.201200488

Ovchinnikov, 2008, Phys. Usp., 51, 955, 10.1070/PU2008v051n09ABEH006795

2008, Usp. Fiz. Nauk, 178, 991

Zakharov, 2012, Phys. Usp., 55, 535, 10.3367/UFNe.0182.201206a.0569

2012, Usp. Fiz. Nauk, 182, 569, 10.3367/UFNr.0182.201206a.0569

Vaisburd, 1982

Haas, 2011, Phys. Rev. B, 84, 10.1103/PhysRevB.84.144303

Guo, 2012, Physica B, 407, 2262, 10.1016/j.physb.2012.03.011

Kluth, 2008, Phys. Rev. Lett., 101, 10.1103/PhysRevLett.101.175503

Kluth, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 2994, 10.1016/j.nimb.2008.03.182

Krauser, 2003, J. Appl. Phys., 94, 1959, 10.1063/1.1587263

O’Connell, 2016, Nucl. Instrum. Meth. Phys. Res. B, 374, 97, 10.1016/j.nimb.2015.09.067

Skuratov, 2014, Nucl. Instrum. Meth. Phys. Res. B, 326, 223, 10.1016/j.nimb.2013.10.037

Schwartz, 2008, Phys. Rev. B, 78, 10.1103/PhysRevB.78.024120

Njoroge, 2016, Nucl. Instrum. Meth. Phys. Res. B, 371, 263, 10.1016/j.nimb.2015.10.014

Bhattacharya, 2002, Surf. Coat. Technol., 158–159, 59, 10.1016/S0257-8972(02)00216-5

Sisodia, 2006, Appl. Surf. Sci., 252, 4016, 10.1016/j.apsusc.2005.09.035

Sisodia, 2009, Rad. Eff. Def. Solids, 164, 566, 10.1080/10420150902742679

Agarwal, 2009, Surf. Interf. Anal., 41, 746, 10.1002/sia.3083

Agarwal, 2010, Appl. Phys. A, 99, 879, 10.1007/s00339-010-5631-2

Nagel, 1999, Nucl. Instrum. Meth. Phys. Res. B, 156, 135, 10.1016/S0168-583X(99)00266-9

Senkara, 1999, Elektronika, 40, 11

Bolse, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 34, 10.1016/S0168-583X(02)02039-6

Schattat, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 105, 10.1016/j.nimb.2004.04.183

Lu, 2012, Nucl. Instrum. Meth. Phys. Res. B, 286, 266, 10.1016/j.nimb.2012.01.023

Wang, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 194, 10.1016/S0168-583X(02)02028-1

Zhang, 2006, Nucl. Instrum. Meth. Phys. Res. B, 249, 167, 10.1016/j.nimb.2006.03.106

Kumar, 2003, Nucl. Instrum. Meth. Phys. Res. B, 212, 242, 10.1016/S0168-583X(03)01493-9

Kumar, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 1759, 10.1016/j.nimb.2008.01.068

Szenes, 2002, Nucl. Instrum. Meth. Phys. Res. B, 191, 186, 10.1016/S0168-583X(02)00556-6

Wang, 1993, Radiat. Eff. Defects Solids, 126, 403, 10.1080/10420159308219751

Toulemonde, 1996, Nucl. Instrum. Meth. Phys. Res. B, 116, 37, 10.1016/0168-583X(96)00007-9

Douillard, 1996, Nucl. Instrum. Meth. Phys. Res. B, 107, 212, 10.1016/0168-583X(95)01044-0

Awazu, 2000, Phys. Rev. B, 62, 3689, 10.1103/PhysRevB.62.3689

Kaniukov, 2016, Nanotechnology, 27, 10.1088/0957-4484/27/11/115305

Busch, 1992, J. Appl. Phys., 71, 2596, 10.1063/1.351078

Dallanora, 2008, J. Appl. Phys., 104, 10.1063/1.2957052

Awazu, 2003, J. Appl. Phys., 94, 6243, 10.1063/1.1618351

Garcia-Navarro, 2006, Nucl. Instrum. Meth. Phys. Res. B, 249, 172, 10.1016/j.nimb.2006.03.107

Komarov, 2005, Vacuum, 78, 361, 10.1016/j.vacuum.2005.01.050

Klaumünzer, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 136, 10.1016/j.nimb.2004.05.014

Klaumünzer, 1989, Nucl. Instrum. Meth. Phys. Res. B, 39, 665, 10.1016/0168-583X(89)90870-7

Sigrist, 1977, Helv. Phys. Acta, 50, 49

Musket, 2002, J. Appl. Phys., 91, 5760, 10.1063/1.1467402

Vlasukova, 2016, Vacuum, 129, 137, 10.1016/j.vacuum.2015.12.023

Carvalho, 2008, Thin Solid Films, 517, 289, 10.1016/j.tsf.2008.08.148

Vlasukova, 2012, Bull. Russ. Acad. Sci. Phys., 76, 582, 10.3103/S1062873812050267

2012, Izv. Ross. Akad. Nauk Ser. Fiz., 76, 653

Al’zhanova, 2016, Nucl. Instrum. Meth. Phys. Res. B, 374, 121, 10.1016/j.nimb.2015.08.046

Vlasukova, 2014, Vacuum, 105, 107, 10.1016/j.vacuum.2014.01.005

Komarov, 2009, Lith. J. Phys., 49, 111, 10.3952/lithjphys.49113

Jensen, 2006, Nucl. Instrum. Meth. Phys. Res. B, 243, 119, 10.1016/j.nimb.2005.07.226

Nomura, 2003, Phys. Rev. B, 68, 10.1103/PhysRevB.68.064106

Vlasukova, 2010, Bull. Russ. Acad. Sci. Phys., 74, 206, 10.3103/S106287381002022X

2010, Izv. Ross. Akad. Nauk Ser. Fiz., 74, 226

Zinkle, 2002, Nucl. Instrum. Meth. Phys. Res. B, 191, 758, 10.1016/S0168-583X(02)00648-1

Canut, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 2819, 10.1016/j.nimb.2008.03.125

Nakajima, 2012, Nucl. Instrum. Meth. Phys. Res. B, 291, 12, 10.1016/j.nimb.2012.09.007

Morita, 2013, Nucl. Instrum. Meth. Phys. Res. B, 315, 142, 10.1016/j.nimb.2013.03.043

Kitayama, 2015, Nucl. Instrum. Meth. Phys. Res. B, 354, 183, 10.1016/j.nimb.2014.11.002

Toulemonde, 2011, Phys. Rev. B, 83, 10.1103/PhysRevB.83.054106

Sun, 2004, Nucl. Instrum. Meth. Phys. Res. B, 218, 318, 10.1016/j.nimb.2003.12.051

Takahashi, 2004, Nucl. Instrum. Meth. Phys. Res. B, 217, 435, 10.1016/j.nimb.2003.10.017

Adla, 2003, J. Polym. Sci. B, 41, 2892, 10.1002/polb.10614

Costantini, 2004, Nucl. Instrum. Meth. Phys. Res. B, 194, 132, 10.1016/S0168-583X(02)00669-9

Virk, 2002, Nucl. Instrum. Meth. Phys. Res. B, 191, 739, 10.1016/S0168-583X(02)00644-4

Severin, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 456, 10.1016/j.nimb.2005.04.019

Diwan, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 4738, 10.1016/j.nimb.2008.07.016

Ma, 2012, Nucl. Instrum. Meth. Phys. Res. B, 286, 233, 10.1016/j.nimb.2012.01.024

Delgado, 2012, Nucl. Instrum. Meth. Phys. Res. B, 273, 55, 10.1016/j.nimb.2011.07.037

Deslandes, 2013, Nucl. Instrum. Meth. Phys. Res. B, 314, 90, 10.1016/j.nimb.2013.05.043

Metz, 2004, Micromech. Microeng., 14, 324, 10.1088/0960-1317/14/3/002

Kaith, 2015, Vacuum, 111, 73, 10.1016/j.vacuum.2014.09.020

Fink, 2007, Nucl. Instrum. Meth. Phys. Res. B, 261, 727, 10.1016/j.nimb.2007.03.018

Fink, 2008, Rad. Meas., 43, 5546, 10.1016/j.radmeas.2008.03.034

Fink, 2008, Vacuum, 82, 900, 10.1016/j.vacuum.2007.12.011

Yamaki, 2013, Nucl. Instrum. Meth. Phys. Res. B, 314, 77, 10.1016/j.nimb.2013.05.028

Neumann, 2013, Nucl. Instrum. Meth. Phys. Res. B, 314, 4, 10.1016/j.nimb.2013.04.035

Zielinska, 2014, Nucl. Instrum. Meth. Phys. Res. B, 326, 131, 10.1016/j.nimb.2013.10.070

Satoh, 2014, Nucl. Instrum. Meth. Phys. Res. B, 332, 242, 10.1016/j.nimb.2014.02.070

Apel, 2014, Nucl. Instrum. Meth. Phys. Res. B, 326, 158, 10.1016/j.nimb.2013.10.089

Hossain, 2014, Nucl. Instrum. Meth. Phys. Res. B, 326, 135, 10.1016/j.nimb.2013.10.074

Lee, 1993, J. Mater. Res., 8, 377, 10.1557/JMR.1993.0377

Pivin, 1995, Thin Solid Films, 263, 185, 10.1016/0040-6090(95)06561-X

Swain, 1997, J. Mater. Res., 12, 1917, 10.1557/JMR.1997.0262

Dfavenas, 1988, Nucl. Instrum. Meth. Phys. Res. B, 32, 166, 10.1016/0168-583X(88)90202-9

Zhu, 1994, Nucl. Instrum. Meth. Phys. Res. B, 91, 469, 10.1016/0168-583X(94)96229-4

Wang, 1997, Nucl. Instrum. Meth. Phys. Res. B, 710, 127

Hnatowicz, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 145, 10.1016/S0168-583X(02)02005-0

Davenas, 1993, 30–31

Paretzke, 1995, 633

Durrani, 1987

Spohr, 1990, 10.1007/978-3-322-83103-3

Apel, 2001, Nucl. Instrum. Meth. Phys. Res. B, 185, 216, 10.1016/S0168-583X(01)00967-3

Cleland, 2003, Nucl. Instrum. Meth. Phys. Res. B, 208, 66, 10.1016/S0168-583X(03)00655-4

Dawes, 1996

Hnatowicz, 1999, Phys. Status Solidi B, 216, 931, 10.1002/(SICI)1521-3951(199912)216:2<931::AID-PSSB931>3.0.CO;2-I

Fleisher, 1965, J. Appl. Phys., 36, 3645, 10.1063/1.1703059

Szenes, 1995, Phys. Rev. B, 52, 6154, 10.1103/PhysRevB.52.6154

1995, Phys. Rev. B, 51, 8026, 10.1103/PhysRevB.51.8026

Balanzat, 1995, Nucl. Instrum. Meth. Phys. Res. B, 105, 46, 10.1016/0168-583X(95)00521-8

Balanzat, 1994, Nucl. Instrum. Meth. Phys. Res. B, 91, 140, 10.1016/0168-583X(94)96204-9

Betz, 1994, J. Polym. Sci. B, 32, 1493, 10.1002/polb.1994.090320821

Picq, 1999, Nucl. Instrum. Meth. Phys. Res. B, 151, 76, 10.1016/S0168-583X(99)00095-6

Ferain, 1993, Nucl. Instrum. Meth. Phys. Res. B, 82, 539, 10.1016/0168-583X(93)96008-Z

Steckenreiter, 1999, Nucl. Instrum. Meth. Phys. Res. B, 151, 161, 10.1016/S0168-583X(99)00093-2

Chipara, 1994, Nucl. Instrum. Meth. Phys. Res. B, 88, 418, 10.1016/0168-583X(94)95393-7

Chipara, 2001, Nucl. Instrum. Meth. Phys. Res. B, 185, 77, 10.1016/S0168-583X(01)00832-1

Dehaye, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 103, 10.1016/S0168-583X(02)02048-7

Ferain, 2001, Radiat. Mes., 34, 585, 10.1016/S1350-4487(01)00233-5

Piraux, 1999, J. Mater. Res., 14, 3042, 10.1557/JMR.1999.0408

Jerome, 2000, Chem. Eur. J., 6, 10.1002/1521-3765(20000901)6:17<3089::AID-CHEM3089>3.0.CO;2-J

Sun, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 188, 10.1016/S0168-583X(02)02027-X

Hama, 2003, Nucl. Instrum. Meth. Phys. Res. B, 208, 123, 10.1016/S0168-583X(03)00984-4

Hai, 2015, Nucl. Instrum. Meth. Phys. Res. B, 356–357, 129, 10.1016/j.nimb.2015.04.075

Radwan, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 3588, 10.1016/j.nimb.2008.06.011

Wada, 1985, J. Chem. Soc. Commun., 1, 1194, 10.1039/C39850001194

Huynh, 2002, Science, 295, 2425, 10.1126/science.1069156

Li, 2004, Appl. Phys. Lett., 84, 3558, 10.1063/1.1728301

Kumar, 2006, Nucl. Instrum. Meth. Phys. Res. B, 251, 451, 10.1016/j.nimb.2006.08.005

Costantini, 2000, J. Appl. Phys., 87, 1899, 10.1063/1.372110

De Bonis, 1999, Nucl. Instrum. Meth. Phys. Res. B, 151, 101, 10.1016/S0168-583X(99)00135-4

Davenas, 1990, Adv. Mater., 2, 521, 10.1002/adma.19900021103

Costantini, 2005, Nucl. Instrum. Meth. Phys. Res. B, 234, 458, 10.1016/j.nimb.2005.01.117

Ramola, 2009, Current Sci., 97, 1453

Hussain, 2006, J. Phys. D, 39, 75

Murugaraj, 2009, Appl. Phys. Lett., 94, 10.1063/1.3106602

Gupta, 2016, Nucl. Instrum. Meth. Phys. Res. B, 381, 76, 10.1016/j.nimb.2016.05.010

Balanzat, 1988, Nucl. Instrum. Meth. Phys. Res. B, 32, 368, 10.1016/0168-583X(88)90239-X

Dobrev, 2001, J. Vac. Sci. Technol. B, 19, 1385, 10.1116/1.1381066

Molares, 2003, Appl. Phys. Lett., 82, 2139, 10.1063/1.1563741

Sharma, 2017, Vacuum, 135, 73, 10.1016/j.vacuum.2016.10.027

Albrecht, 1985, Appl. Phys. A, 37, 37, 10.1007/BF00617867

Saleh, 2004, Appl. Phys. Lett., 85, 2529, 10.1063/1.1798397

Saleh, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 81, 10.1016/j.nimb.2005.03.258

Apel, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 329, 10.1016/S0168-583X(02)02057-8

Apel, 1995, Radiat. Meas., 25, 667, 10.1016/1350-4487(95)00219-5

Bryk, 2006, Nucl. Instrum. Meth. Phys. Res. B, 251, 419, 10.1016/j.nimb.2006.07.017

Mazzei, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 407, 10.1016/j.nimb.2005.04.007

Shmidt, 1996, Nucl. Instrum. Meth. Phys. Res. B, 107, 381, 10.1016/0168-583X(95)01009-2

Kravets, 1997, Khim. Vys. Energ., 31, 108

Shirokova, 1997, Radiat. Meas., 28, 791, 10.1016/S1350-4487(97)00186-8

Skuratov, 1997, Mater. Sci. Forum, 248, 399, 10.4028/www.scientific.net/MSF.248-249.399

Baryley, 2000, Chem. Rev., 100, 2575, 10.1021/cr980099g

Kohli, 2004, Science, 305, 984, 10.1126/science.1100024

Menon, 1995, Anal. Chem., 67, 1920, 10.1021/ac00109a003

Grasseli, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 501, 10.1016/j.nimb.2005.04.027

Mazzei, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 407, 10.1016/j.nimb.2005.04.007

Xia, 2003, Adv. Mater., 15, 351, 10.1002/adma.200390086

Ferain, 2003, Nucl. Instrum. Meth. Phys. Res. B, 208, 115, 10.1016/S0168-583X(03)00637-2

Spohr, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 676, 10.1016/j.nimb.2009.12.017

Trautmann, 2009, 369, 10.1007/978-3-642-00623-4_30

Martin, 1994, Science, 266, 1961, 10.1126/science.266.5193.1961

Apel, 2003, Nucl. Instrum. Meth. Phys. Res. B, 208, 11, 10.1016/S0168-583X(03)00634-7

Toimil Molares, 2004, Nanotechnology, 15, S201, 10.1088/0957-4484/15/4/015

Chtanko, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 103, 10.1016/j.nimb.2005.03.264

Man, 2007, Nucl. Instrum. Meth. Phys. Res. B, 265, 621, 10.1016/j.nimb.2007.09.029

Trautmann, 1991, Nucl. Tracks Radiat. Meas., 19, 967, 10.1016/1359-0189(91)90352-I

Siwy, 2003, Nucl. Instrum. Meth. Phys. Res. B, 208, 143, 10.1016/S0168-583X(03)00884-X

Ohgai, 2008, J. Appl. Electrochem., 38, 713, 10.1007/s10800-008-9499-1

Mara, 2004, Nano Lett., 4, 497, 10.1021/nl035141o

Sergent-Engelen, 1990, Biotechnol. Tech., 4, 89, 10.1007/BF00163279

Bignold, 1989, J. Immun. Meth., 118, 217, 10.1016/0022-1759(89)90009-4

Fink, 2005, Nucl. Instrum. Meth. Phys. Res. B, 236, 11, 10.1016/j.nimb.2005.03.243

Duan, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 2567, 10.1016/j.nimb.2009.05.015

Chen, 2004, Appl. Phys. Lett., 85, 1401, 10.1063/1.1784037

Berggren, 1995, Science, 267, 1479, 10.1126/science.267.5203.1479

Schon, 2000, Science, 290, 963, 10.1126/science.290.5493.963

Lindeberg, 2002

Berdinsky, 2000, Chem. Sustainable Dev., 8, 141

Fink, 2003, Radiat. Meas., 36, 605, 10.1016/S1350-4487(03)00209-9

Bohm, 2000, Sensors Actuat. B, 63, 201, 10.1016/S0925-4005(00)00358-0

Yoshida, 1997, Nucl. Instrum. Meth. Phys. Res. B, 122, 39, 10.1016/S0168-583X(96)00653-2

Yousef, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 1659, 10.1016/j.nimb.2007.11.014

Fink, 2005, 2

Fink, 2004, Nucl. Instrum. Meth. Phys. Res. B, 218, 355, 10.1016/j.nimb.2003.12.083

Hoppe, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 1642, 10.1016/j.nimb.2007.12.069

Zollondz, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 178, 10.1016/j.nimb.2004.03.011

Thornell, 1999, Sensors Actuators A, 73, 176, 10.1016/S0924-4247(98)00268-4

Thornell, 2000, IEEE Trans. Ultrason. Ferroelectrics, 47, 8, 10.1109/58.818744

Pezzagna, 2011, Phys. Status Solidi A, 208, 2017, 10.1002/pssa.201100455

Sanz, 2007, Nanotechnology, 18, 10.1088/0957-4484/18/30/305303

Skupinski, 2007, Vacuum, 82, 359, 10.1016/j.vacuum.2007.05.002

Mitrofanov, 2006, Nucl. Instrum. Meth. Phys. Res. B, 245, 332, 10.1016/j.nimb.2005.11.078

Fisher, 1983, Rev. Mod. Phys., 55, 907, 10.1103/RevModPhys.55.907

2002

Akapiev, 2003, Nucl. Instrum. Meth. Phys. Res. B, 208, 133, 10.1016/S0168-583X(03)01182-0

Stolterfoht, 2002, Phys. Rev. Lett., 88, 10.1103/PhysRevLett.88.133201

Li, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 469, 10.1016/j.nimb.2008.11.041

Stolterfoht, 2013, Nucl. Instrum. Meth. Phys. Res. B, 317, 96, 10.1016/j.nimb.2013.01.051

Keerthisinghe, 2013, Nucl. Instrum. Meth. Phys. Res. B, 317, 105, 10.1016/j.nimb.2013.01.047

Komarov, 2009, Vacuum, 83, S51, 10.1016/j.vacuum.2009.01.020

Gravier, 2002, IEEE Trans. Magn., 38, 2700, 10.1109/TMAG.2002.803151

Enculescu, 2007, Appl. Phys. A, 86, 43, 10.1007/s00339-006-3738-2

Ferain, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 1028, 10.1016/j.nimb.2009.02.013

Zhu, 2015, Nucl. Instrum. Meth. Phys. Res. B, 356–357, 57, 10.1016/j.nimb.2015.04.061

Gudiksen, 2002, J. Phys. Chem. B, 106, 4036, 10.1021/jp014392n

2001

Ameniya, 2015, Nucl. Instrum. Meth. Phys. Res. B, 356–357, 154, 10.1016/j.nimb.2015.05.002

Fleischer, 1995, MRS Bull., 20, 35, 10.1557/S0883769400045887

Durante, 1994, Nucl. Instrum. Meth. Phys. Res. B, 94, 251, 10.1016/0168-583X(94)95363-5

Snoeks, 2000, Adv. Mater., 12, 1511, 10.1002/1521-4095(200010)12:20<1511::AID-ADMA1511>3.0.CO;2-6

van Dillen, 2001, Nucl. Instrum. Meth. Phys. Res. B, 175, 350, 10.1016/S0168-583X(00)00611-X

Klaumünzer, 2004, Nucl. Instrum. Meth. Phys. Res. B, 215, 345, 10.1016/j.nimb.2003.08.031

D’Orleans, 2004, Nucl. Instrum. Meth. Phys. Res. B, 225, 154, 10.1016/j.nimb.2004.06.012

Klaumünzer, 2006, Nucl. Instrum. Meth. Phys. Res. B, 244, 1, 10.1016/j.nimb.2005.11.006

Penninkhof, 2006, Nucl. Instrum. Meth. Phys. Res. B, 242, 523, 10.1016/j.nimb.2005.08.116

Giulian, 2008, Nucl. Instrum. Meth. Phys. Res. B, 266, 3158, 10.1016/j.nimb.2008.03.176

Kerboua, 2011, Nucl. Instrum. Meth. Phys. Res. B, 269, 2006, 10.1016/j.nimb.2011.06.001

Rizza, 2016, 443, 10.1007/978-3-319-33561-2_11

Sprouster, 2011, Appl. Phys., 109, 10.1063/1.3587171

D’Orleans, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 316, 10.1016/S0168-583X(02)02054-2

Roorda, 2004, Adv. Mater., 16, 235, 10.1002/adma.200305742

van Dillen, 2004, Mater. Today, 7, 40, 10.1016/S1369-7021(04)00345-1

Ridgway, 2011, Phys. Rev. Lett., 106, 10.1103/PhysRevLett.106.095505

Awazu, 2008, Phys. Rev. B, 78, 10.1103/PhysRevB.78.054102

Kluth, 2009, Appl. Phys. Lett., 94, 10.1063/1.3099971

Zeng, 2000, Appl. Phys., 87, 4718, 10.1063/1.373137

Pannu, 2016, Nucl. Instrum. Meth. Phys. Res. B, 379, 206, 10.1016/j.nimb.2016.02.034

Davi, 2016, Nucl. Instrum. Meth. Phys. Res. B, 384, 86, 10.1016/j.nimb.2016.08.009

Kerboua, 2013, Thin Solid Films, 527, 186, 10.1016/j.tsf.2012.12.007

Datta, 2014, Appl. Surf. Sci., 310, 164, 10.1016/j.apsusc.2014.03.121

Oliver, 2006, Phys. Rev. B, 74, 10.1103/PhysRevB.74.245425

Singh, 2013, Nucl. Instrum. Meth. Phys. Res. B, 311, 5, 10.1016/j.nimb.2013.06.011

Yang, 2013, Nucl. Instrum. Meth. Phys. Res. B, 308, 24, 10.1016/j.nimb.2013.05.004

Ridgway, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 931, 10.1016/j.nimb.2009.02.025

Joseph, 2007, Nucl. Instrum. Meth. Phys. Res. B, 256, 659, 10.1016/j.nimb.2006.12.183

Giulian, 2008, Phys. Rev. B, 78, 10.1103/PhysRevB.78.125413

Johanessen, 2006, Nucl. Instrum. Meth. Phys. Res. B, 250, 210, 10.1016/j.nimb.2006.04.112

Krasheninnikov, 2010, J. Appl. Phys., 107, 10.1063/1.3318261

Avasthi, 2011, 10.1007/978-94-007-1229-4

Mishra, 2007, Appl. Phys. Lett., 91, 10.1063/1.2764556

Giulian, 2010, Phys. Rev. B, 82, 10.1103/PhysRevB.82.113410

Mahanta, 2006, Eur. Phys. J. Appl. Phys., 35, 29, 10.1051/epjap:2006073

Shirai, 2009, Nucl. Instrum. Meth. Phys. Res. B, 269, 1787, 10.1016/j.nimb.2009.03.079

Schmidt, 2009, Nucl. Instrum. Meth. Phys. Res. B, 267, 1345, 10.1016/j.nimb.2009.01.062

Amekura, 2013, Appl. Phys. Lett., 103, 10.1063/1.4829475

Rodichev, 1996, Nucl. Instrum. Meth. Phys. Res. B, 107, 259, 10.1016/0168-583X(95)01043-2

Hirschman, 1996, Nature, 384, 338, 10.1038/384338a0

Arnoldbik, 2005, Phys. Rev. B, 71, 10.1103/PhysRevB.71.125329

Arnoldbik, 2007, Nucl. Instrum. Meth. Phys. Res. B, 258, 199, 10.1016/j.nimb.2006.12.103

Saxena, 2012, Phys. Status Solidi A, 209, 283, 10.1002/pssa.201127467

Ardyanian, 2006, Appl. Phys. Lett., 89, 10.1063/1.2218830

Batra, 2007, J. Phys. D, 40, 4568, 10.1088/0022-3727/40/15/029

Mohanty, 2007, J. Nanosci. Nanotechnol., 7, 1, 10.1166/jnn.2007.764

Tripathi, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 3335, 10.1016/j.nimb.2010.07.009

Iwase, 2002, Nucl. Instrum. Meth. Phys. Res. B, 195, 309, 10.1016/S0168-583X(02)01131-X

Valentin, 2001, Phys. Rev. Lett., 86, 99, 10.1103/PhysRevLett.86.99

Volkov, 2003, Nucl. Instrum. Meth. Phys. Res. B, 209, 98, 10.1016/S0168-583X(02)02063-3

Antonova, 2009, Nanotechnology, 20

Rao, 2010, Nucl. Instrum. Meth. Phys. Res. B, 268, 1741, 10.1016/j.nimb.2010.02.013

Saikiran, 2014, Nucl. Instrum. Meth. Phys. Res. B, 323, 14, 10.1016/j.nimb.2014.01.004

Komarov, 2016, Bull. Russ. Acad. Sci. Phys., 80, 141, 10.3103/S106287381602012X

2016, Izv. Ross. Akad. Nauk Ser. Fiz., 80, 160, 10.7868/S0367676516020149

Saikiran, 2014, Nucl. Instrum. Meth. Phys. Res. B, 333, 99, 10.1016/j.nimb.2014.04.013

Rizza, 2007, Nucl. Instrum. Meth. Phys. Res. B, 256, 219, 10.1016/j.nimb.2006.12.012

Sprouster, 2009, Phys. Rev. B, 80, 10.1103/PhysRevB.80.115438

Leino, 2014, Eur. Phys. J. B, 87, 242, 10.1140/epjb/e2014-50359-x

Studer, 1993, Nucl. Instrum. Meth. Phys. Res. B, 82, 91, 10.1016/0168-583X(93)95087-L

Gokholl, 2014, Nucl. Instrum. Meth. Phys. Res. B, 333, 64, 10.1016/j.nimb.2014.04.020

Ghidini, 1995, J. Magn. Magn. Mater., 140–144, 483, 10.1016/0304-8853(94)00732-2

Srivastava, 2006, J. Phys. D, 39, 1465, 10.1088/0022-3727/39/8/001

Provost, 1995, MRS Bull., 20, 22, 10.1557/S0883769400045863

Wiesner, 1996, Physica C, 268, 161, 10.1016/0921-4534(96)00381-4

Rani, 2008, Nanosensor Technol., 2008

Messenger, 1997, 10.1007/978-1-4615-6043-2

Cellere, 2016, J. Appl. Phys., 38, 160

Ma, 2012, Nucl. Instrum. Meth. Phys. Res. B, 273, 40, 10.1016/j.nimb.2011.07.033

Kumar, 2010, Nanotechnology, 21, 10.1088/0957-4484/21/17/175102

Merk, 2013, Nucl. Instrum. Meth. Phys. Res. B, 306, 81, 10.1016/j.nimb.2012.11.043

Durante, 2014, Life Sci. Space Res., 1, 2, 10.1016/j.lssr.2014.01.002

Guan, 2013, Nucl. Instrum. Meth. Phys. Res. B, 315, 318, 10.1016/j.nimb.2013.05.075

Liu, 2014, Nucl. Instrum. Meth. Phys. Res. B, 325, 43, 10.1016/j.nimb.2014.02.009

Yang, 2011, Appl. Opt., 50, 6678, 10.1364/AO.50.006678

Yao, 2011, Opt. Express, 19, 2452

Zhou, 2013, Nucl. Instrum. Meth. Phys. Res. B, 315, 328, 10.1016/j.nimb.2013.04.023

Kip, 1998, Appl. Phys. B, 67, 131, 10.1007/s003400050485

Prabakaran, 2017, Nucl. Instrum. Meth. Phys. Res. B, 394, 81, 10.1016/j.nimb.2016.12.042

Biswas, 2003, Nano Lett., 3, 69, 10.1021/nl020228f

Bhavsar, 2016, Nucl. Instrum. Meth. Phys. Res. B, 379, 95, 10.1016/j.nimb.2016.04.019

Seki, 2001, Adv. Mater., 13, 1663, 10.1002/1521-4095(200111)13:22<1663::AID-ADMA1663>3.0.CO;2-8

Biswas, 2004, Nucl. Instrum. Meth. Phys. Res. B, 217, 39, 10.1016/j.nimb.2003.09.032

Norman, 2013, Contrib. Plasma Phys., 53, 129, 10.1002/ctpp.201310025

Saumon, 2014, 151, 10.1007/978-3-319-04912-0_6

Sadi, 2014, Nucl. Instrum. Meth. Phys. Res. B, 328, 78, 10.1016/j.nimb.2014.02.008