R.-K. Leach et al., Nanotechnology 22, 062001 (2011)
N.-R. Ulrich et al., Tech. Mess. 78, 118 (2011)
V. Korpelainen, A. Lassila, Meas. Sci. Technol. 18, 395 (2007)
G. Jäger, E. Manske, T. Hausotte, H. J. Buchner, Tech. Mess. 67, 319 (2000)
F. Petrů, Z. Veselá, Opt. Commun. 96, 339 (1993)
J. Lazar et al. Meas. Sci. Technol. 20, 084007 (2009)
J. Lazar, J. Hrabina, P. Jedlička, Číp, Metrologia 46, 450 (2009)
G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, Rev. Sci. Instrum. 80, 043702 (2009)
R. Köning, J. Flügge, H. Bosse, Meas. Sci. Technol. 18, 476 (2007)
V. Korpelainen, J. Seppä, A. Lassila, Precis. Eng. 34, 735 (2010)
J. Haycocks, K. Jackson, Precis. Eng. 29, 168 (2005)
A. Jansen, N. Rosielle, P. Schellekens, J. Corbett and B. A. Damazo (Eds.), Proc. of the Fourteenth Annual Meeting of the American Society for Precision Engineering, Oct. 31–Nov. 5, 1999, Monterey, CA, USA (American Society for Precision Engineering, Raleigh, NC, USA 1999) 452
B. Poyet, Optical Micro- and Nanometrology III, P Spie Is & T Elect. Im., 7718 (2010)
C. Werner, P. C. J. N. Rosielle, M. Steinbuch M., Int. J. Mach. Tool. Manu. 50, 183 (2010)
J. K. van Seggelen, et al., CIRP Ann.-Manuf. Techn. 54, 487 (2005)
H. Haitjema, P. C. J. N. Rosielle, G. Kotte, H. Steijaart, Meas. Sci. Technol. 9, 1098 (1998)
G. Jäger, E. Manske, T. Hausotte, Tech. Mess. 73, 457 (2006)
B. J. Eves, Meas. Sci. Technol. 20, 084003 (2009)
G. Dai, S. Butefisch, F. Pohlenz, H.-U. Danzebrink, L. Koenders, Tech. Mess. 76, 43 (2009)
G. Jäger, et al., Measurement 43, 1099 (2010)
M. M. P.A. Vermeulen, P. C. J. N. Rosielle, P. H. J. Schellekens, CIRP Ann.-Manuf. Techn. 47, 447 (1998)
M. Vermeulen, PhD thesis, Eindhoven University of Technology (Eindhoven, The Netherlands, 1999)
T. Ruijl, PhD thesis, Delft University of Technology (Delft, The Netherlands, 2001)
B. Edlén, Metrologia 2, 71 (1966)
B. Bönsch, E. Potulski, Metrologia 35, 133 (1998)
T. B. Quoc, M. Ishige, Y. Ohkubo, et al., Meas. Sci. Technol. 20, 125302 (2009)
O. Číp, F. Petrů, Meas. Sci. Technol. 11, 133 (2000)
F. Petrů, O. Číp, Precis. Eng. 23, 39 (1999)
T. J. Quinn, Metrologia 30, 523 (1994)
J. D. Simmons, J. T. Hougen, Res. Nat. Bur. Stand. 81A, 25 (2009)
