F. Durst, A. al-Salaymeh, A novel single-wire sensor for wide range flow velocity measurements, in: Proceedings of the SENSOR 2001, A5.
L. Castañer, V. Jiménez, M. Domı́nguez, F. Masana, A. Rodriguez, Design and fabrication of a low cost water flowmeter, in: Proceedings of the 1997 International Conference on Solid-state Sensors and Actuators, TRANSDUCERS’97, pp. 159–162.
F. Mayer, A. Haberli, H. Jacobs, G. Ofner, O. Paul, H. Baltes, Proceedings of the International Single-chip CMOS Anemometer Electron Devices Meeting, Technical Digest, 1997, pp. 895–898.
Glaninger, 2000, Wide range semiconductor flow sensors, Sens. Actuators, 85, 139, 10.1016/S0924-4247(00)00370-8
Mailly, 2001, Anemometer with hot platinum thin film, Sens. Actuators A, 94, 32, 10.1016/S0924-4247(01)00668-9
Neda, 1996, A polysilicon flow sensor for gas flow meters, Sens. Actuators A, 54, 626, 10.1016/S0924-4247(97)80027-1
Moser, 1992, Fabrication and modeling of CMOS microbridge gas-flow sensors, Sens. Actuators B, 6, 165, 10.1016/0925-4005(92)80050-8
T. Ebefors, E. Kälvesten, G. Stemme, Three dimensional silicon triple-hot-wire anemometer based on polymide joints, in: Proceedings of the Micro Electro Mechanical Systems, 1998, pp. 93–98.
M. Elwenspoek, Proceedings of the 1999 International Semiconductor Conference on Thermal Flow Microsensors, CAS’99, vol. 2, 1999, pp. 423–435.
Nguyen, 1997, Asymmetrical locations of heaters and sensors relative to each other using heater arrays: a novel method for designing multi-range electrocaloric mass-flow sensors, Sens. Actuators A, 62, 506, 10.1016/S0924-4247(97)01529-X
Lammerink, 1993, Micro-liquid flow sensor, Sens. Actuators A, 37–38, 45, 10.1016/0924-4247(93)80010-E
N. Sabaté, I. Gràcia, C. Cané, J. Berganzo, J. Puicorbé, J.R. Morante, Low cost thermal flow sensor for home-appliances applications, in: Proceedings of the SPIE 4755 on Design, Test, Integration and Packaging, MEMS/MOEMS 2002, 2002, pp. 549–555.
N. Sabaté, I. Gràcia, J. Santander, C. Cané, A test structure for the design of thermal flow sensors, in: Proceedings of the International Conference on Microelectronic Test Structures, April 8–11, 2002, Cork, Ireland, IEEE, 2002, pp. 107–110.