Modelling and experimental study of nanoscratching process on PMMA thin-film using AFM tip-based nanomachining approach

Jiu, 2016, Metallic nanowires and their application, IEEE Trans Compon Packag Manuf Technol, 1 Sannicolo, 2016, Metallic nanowire-based transparent electrodes for next generation flexible devices: a review, Small, 12, 6052, 10.1002/smll.201602581 Fennell, 2016, Nanowire chemical/biological sensors: status and a roadmap for the future, Angew Chem Int Ed, 55, 1266, 10.1002/anie.201505308 Dawson, 2012, Electroanalysis at single gold nanowire electrodes, J Phys Chem C, 116, 14665, 10.1021/jp302967p Dawson, 2011, Single on-chip gold nanowires for electrochemical biosensing of glucose, Analyst, 136, 4507, 10.1039/c1an15279c Binnig, 1986, Atomic force microscope, J Mater Eng, 56, 930 Tseng, 2011, Removing material using atomic force microscopy with single-and multiple-tip sources, Small, 7, 3409, 10.1002/smll.201100486 Yan, 2015, Recent advances in AFM tip-based nanomechanical machining, Int J Mach Tool Manufact, 99, 1, 10.1016/j.ijmachtools.2015.09.004 He, 2018, Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope, Appl Surf Sci, 427, 1076, 10.1016/j.apsusc.2017.08.134 Zhang, 2012, High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope, Nanotechnology, 23, 10.1088/0957-4484/23/8/085303 Elkaseer, 2014, Modelling the surface generation process during AFM probe-based machining: simulation and experimental validation, Surf Topogr Metrol Prop, 2, 10.1088/2051-672X/2/2/025001 Geng, 2013, Modelling and experimental study of machined depth in AFM-based milling of nanochannels, Int J Mach Tool Manufact, 73, 87, 10.1016/j.ijmachtools.2013.07.001 Li, 2005, Top-down structure and device fabrication using in situ nanomachining, Appl Phys Lett, 87, 10.1063/1.2139991 Wang, 2013, Reprint of Nanowear behaviour of monocrystalline silicon against SiO2 tip in water, Wear, 298–299, 80, 10.1016/j.wear.2012.12.049 Wendel, 1994, Nanolithography with an atomic force microscope for integrated fabrication of quantum electronic devices, Appl Phys Lett, 65, 1775, 10.1063/1.112914 Yan, 2016, Review on AFM tip-based mechanical nanomachining: the influence of the input machining parameters on the outcomes, Curr Nanosci, 12 Al-Musawi, 2016, Insight into mechanics of AFM tip-based nanomachining: bending of cantilevers and machined grooves, Nanotechnology, 27, 10.1088/0957-4484/27/38/385302 Geng, 2014, Depth prediction model of nano-grooves fabricated by AFM-based multi-passes scratching method, Appl Surf Sci, 313, 615, 10.1016/j.apsusc.2014.06.033 Kawasegi, 2006, Nanomachining of silicon surface using atomic force microscope with diamond tip, J Manuf Sci Eng, 128, 723, 10.1115/1.2163364 Chen, 2005, Fabrication of metal nanowires by atomic force microscopy nanoscratching and lift-off process, Nanotechnology, 16, 1112, 10.1088/0957-4484/16/8/020 Lin, 2008, Fabrication of a single metal nanowire connected with dissimilar metal electrodes and its application to chemical sensing, Anal Chem, 80, 1937, 10.1021/ac701911j Geng, 2017, Investigation on friction behavior and processing depth prediction of polymer in nanoscale using AFM probe-based nanoscratching method, Tribol Int, 114, 33, 10.1016/j.triboint.2017.04.009 Wang, 2012, Material removal model for AFM-based nanochannel fabrication, Wear, 278–279, 71, 10.1016/j.wear.2012.01.005 Malekian, 2010, Atomic force microscope probe-based nanometric scribing, J Micromech Microeng, 20, 10.1088/0960-1317/20/11/115016 Dongmo, 2000, Experimental test of blind tip reconstruction for scanning probe microscopy, Ultramicroscopy, 85, 141, 10.1016/S0304-3991(00)00051-6 Varenberg, 2003, An improved wedge calibration method for lateral force in atomic force microscopy, Rev Sci Instrum, 74, 3362, 10.1063/1.1584082 Wang, 2007, Effect of contact stiffness on wedge calibration of lateral force in atomic force microscopy, Rev Sci Instrum, 78, 10.1063/1.2720723 Yan, 2012, Effects of atomic force microscope silicon tip geometry on large-scale nanomechanical modification of the polymer surface, Tribol Trans, 55, 846, 10.1080/10402004.2012.720001 Doering, 2017, High-speed microprobe for roughness measurements in high-aspect-ratio Microstructures, Meas Sci Technol, 28, 10.1088/1361-6501/28/3/034009 Sader, 1999, Calibration of rectangular atomic force microscope cantilevers, Rev Sci Instrum, 70, 3967, 10.1063/1.1150021 Cappella, 2002, Breaking polymer chains by dynamic plowing lithography, Polymer, 43, 4461, 10.1016/S0032-3861(02)00285-9 Saha, 2002, Effects of the substrate on the determination of thin film mechanical properties by nanoindentation, Acta Mater, 50, 23, 10.1016/S1359-6454(01)00328-7 Yan, 2014, Effect of elastic modulus of PMMA films on its machinability by AFM-based nanoscratching method, Proc SPIE Int Society Opt Eng, 9283