Model for Thermal Oxidation of Silicon

Pleiades Publishing Ltd - Tập 64 Số 4 - Trang 575-581 - 2019
А. В. Фадеев1, Yu. N. Devyatko2
1Valiev Institute of Physics and Technology, Russian Academy of Sciences, 117218, Moscow, Russia
2National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, 115409 Moscow, Russia

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