Gilbert O. Brink1, Robert A. Fluegge1, Robert J. Hull2
1Cornell Aeronautical Laboratory, Buffalo, New York 14221
2State University of New York at Buffalo, Buffalo, New York 14214
Tóm tắt
An atomic and molecular beam source is described which overcomes disadvantages present in earlier types of microwave discharge sources. The source uses a resonant coaxial line which requires no tuning adjustments inside the vacuum system. No water cooling is required. The source operates efficiently over a wide discharge pressure range and for many different discharge gases.
