Micro-liquid flow sensor

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Branebjerg, 1991, A micromachined flow sensor for measuring small liquid flows, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 41

Yang, 1992, Monolithic flow sensor for measuring millilitre per minute liquid flow, Sensors and Actuators A, 33, 143, 10.1016/0924-4247(92)80160-5

Petersen, 1985, High precision, high performance mass-flow sensor with integrated laminar flow microchannels, Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, USA, 361

Wachutka, 1991, Analytical 2D-model of CMOS micromachined gas flow sensors, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 22

Stephan, 1991, A micromachined, silicon mass-air-flow sensor for automotive applications, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 30

van Oudheusden, 1992, Silicon thermal flow sensors, Sensors and Actuators A, 30, 5, 10.1016/0924-4247(92)80192-6

Johnson, 1987, A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications, Sensors and Actuators, 11, 63, 10.1016/0250-6874(87)85005-9

Esashi, 1991, Micro flow sensor and integrated magnetic oxygen sensor using it, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 34

Swart, 1991, Numerical optimisation of flow-rate microsensors using circuit simulation tools, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 26

Lammerink, 1993, Integrated liquid dosing system, Proc. MEMS '93 Conference, Fort Lauderdale, FL, USA, 254

Miyake, 1993, Micro mixer with fast diffusion, Proc. MEMS '93 Conference, Fort Lauderdale, FL, USA, 248