Metal-assisted electrochemical etching of silicon

Nanotechnology - Tập 21 Số 46 - Trang 465301 - 2010
Zhipeng Huang1, Nadine Geyer2, Lifeng Liu2, M Y Li1, Peng Zhong1
1Functional Molecular Materials Center, Scientific Research Academy, Jiangsu University, Zhenjiang 212013, People's Republic of China
2Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, Saale, Germany

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Nanotechnology

Tập 21 Số 46

465301

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