Mechanically tuneable microoptical structure based on PDMS

Procedia Chemistry - Tập 1 - Trang 560-563 - 2009
V.J. Cadarso1,2, A. Llobera1, G. Villanueva1, J.A. Plaza1, J. Brugger2, C. Dominguez1
1Instituto de Microelectrònica de Barcelona (IMB-CNM-CSIC), Campus UAB 08193 Barcelona, Spain
2Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland

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