Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Sensors and Actuators - Tập 20 Số 1-2 - Trang 135-141 - 1989
Osamu Tabata1, Ken Kawahata1, Susumu Sugiyama1, Isemi Igarashi1
1Toyota Central Research and Development Laboratories Inc., Nagakute-cho, Aichi-gun, Aichi-ken 480-11, Japan

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