Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
Tóm tắt
Từ khóa
Tài liệu tham khảo
Senturia, 1987, Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan, 11
Tai, 1988, Tech. Digest, IEEE Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, U.S.A., 88, 10.1109/SOLSEN.1988.26440
Fan, 1989, Tech. Digest, IEEE Micro Electromechanical Systems Workshop, Salt Lake City, UT, U.S.A., 40
Najafi, 1989, Tech. Digest. IEEE Micro Electro-mechanical Systems Workshop, Salt Lake City, UT, U.S.A., 96
Timoshenko, 1959
Sugiyama, 1986, Tech. Digest, IEEE IEDM, 184
Tabata, 1988, Tech. Digest, 7th Sensor Symp., Japan, 173
Tabata, 1989, Tech. Digest, 8th Sensor Symp. Japan, 149